User contributions for Biljana
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21 April 2020
- 19:2219:22, 21 April 2020 diff hist −2 PECVD Recipes →SiN 250C deposition (Unaxis VLR)
- 19:2119:21, 21 April 2020 diff hist +37 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 19:1819:18, 21 April 2020 diff hist +1 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 19:1619:16, 21 April 2020 diff hist −268 PECVD Recipes →SiO2 250C Deposition (Unaxis VLR)
- 19:1419:14, 21 April 2020 diff hist +358 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 19:0519:05, 21 April 2020 diff hist −699 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 19:0319:03, 21 April 2020 diff hist +418 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 19:0219:02, 21 April 2020 diff hist +49 PECVD Recipes →SiN deposition (PECVD #1) Tag: Visual edit
- 18:5518:55, 21 April 2020 diff hist +120 PECVD Recipes →Standard Recipe
- 18:5418:54, 21 April 2020 diff hist +118 PECVD Recipes →Standard Recipe
- 18:5318:53, 21 April 2020 diff hist +112 PECVD Recipes →Standard Recipe
- 18:0218:02, 21 April 2020 diff hist −21 PECVD Recipes →Standard Recipe Tag: Visual edit
- 18:0018:00, 21 April 2020 diff hist +72 N STD SiO2 recipe Created page with "[https://wiki.nanotech.ucsb.edu/w/images/4/4f/Adv._PECVD2-STD_SiO2.xlsx]" current Tag: Visual edit
- 18:0018:00, 21 April 2020 diff hist +21 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 17:5917:59, 21 April 2020 diff hist 0 File:Adv. PECVD2-STD SiO2.xlsx Biljana uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx current
- 17:5317:53, 21 April 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 17:4317:43, 21 April 2020 diff hist −93 PECVD Recipes →Standard Recipe
- 17:4317:43, 21 April 2020 diff hist −1 PECVD Recipes →Standard Recipe
- 17:4317:43, 21 April 2020 diff hist +2 PECVD Recipes →Standard Recipe
- 17:4217:42, 21 April 2020 diff hist +92 PECVD Recipes →Standard Recipe
- 17:3517:35, 21 April 2020 diff hist −91 PECVD Recipes →Standard Recipe
- 17:2917:29, 21 April 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 17:2417:24, 21 April 2020 diff hist +69 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:1817:18, 21 April 2020 diff hist +4 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:1717:17, 21 April 2020 diff hist +17 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 17:1617:16, 21 April 2020 diff hist −293 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0917:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 17:0817:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx No edit summary current
- 17:0717:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 17:0617:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0517:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx No edit summary current
- 17:0517:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 17:0417:04, 21 April 2020 diff hist −9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0317:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 17:0217:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0017:00, 21 April 2020 diff hist −241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5916:59, 21 April 2020 diff hist −90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5816:58, 21 April 2020 diff hist −1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5716:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5716:57, 21 April 2020 diff hist −93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 16:5516:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 16:5416:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx No edit summary
20 April 2020
- 21:1021:10, 20 April 2020 diff hist −181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 20:5220:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 20:4920:49, 20 April 2020 diff hist −855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 20:4120:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 20:3220:32, 20 April 2020 diff hist −132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 18:2818:28, 20 April 2020 diff hist −6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 18:2818:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 18:2718:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit