User contributions for Biljana
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15 July 2020
- 03:4603:46, 15 July 2020 diff hist −124 PECVD Recipes →SiN deposition (PECVD #2)
- 03:4503:45, 15 July 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 03:4303:43, 15 July 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
- 03:4103:41, 15 July 2020 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2)
- 03:4003:40, 15 July 2020 diff hist +1 PECVD Recipes →PECVD 2 (Advanced Vacuum)
2 July 2020
- 19:0319:03, 2 July 2020 diff hist −8 Unaxis wafer coating procedure →a) Prepare wafers: Tag: Visual edit
- 19:0219:02, 2 July 2020 diff hist −20 Unaxis wafer coating procedure →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 19:0119:01, 2 July 2020 diff hist +29 Unaxis wafer coating procedure No edit summary Tag: Visual edit
- 19:0119:01, 2 July 2020 diff hist +7 Unaxis wafer coating procedure No edit summary Tag: Visual edit
- 19:0019:00, 2 July 2020 diff hist +4,199 N Unaxis wafer coating procedure Created page with "'''1. Unaxis deposition - 300nm of SiO2 LDR film @250°C''' a) Prepare wafers: · Regular 4 " Si wafer ~500nm think for seasoning · Your substrate for d..." Tag: Visual edit
- 18:4718:47, 2 July 2020 diff hist −58 ICP-PECVD (Unaxis VLR) No edit summary Tag: Visual edit
- 18:4418:44, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 18:4218:42, 2 July 2020 diff hist +68 N Wafer coating procedure Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]" current Tag: Visual edit
- 18:4118:41, 2 July 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating procedure correction Tag: Visual edit
- 18:3718:37, 2 July 2020 diff hist −76 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 18:3618:36, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
12 June 2020
- 05:3905:39, 12 June 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 05:3705:37, 12 June 2020 diff hist −125 PECVD Recipes →Thin-Film Properties
- 05:3705:37, 12 June 2020 diff hist +125 PECVD Recipes →Thin-Film Properties
27 May 2020
- 17:1217:12, 27 May 2020 diff hist −17 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 17:1217:12, 27 May 2020 diff hist +77 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 17:1017:10, 27 May 2020 diff hist +40 N File:SOP for Advanced Vacuum PECVD.pdf 5-27-2020 Biljana Stamenic current
- 17:0417:04, 27 May 2020 diff hist +49 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 17:0217:02, 27 May 2020 diff hist −58 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:5816:58, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:5816:58, 27 May 2020 diff hist −8 PECVD 2 (Advanced Vacuum) No edit summary Tag: Visual edit
- 16:5516:55, 27 May 2020 diff hist +63 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:5416:54, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:5416:54, 27 May 2020 diff hist +15 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:5316:53, 27 May 2020 diff hist −91 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:4716:47, 27 May 2020 diff hist +65 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:4616:46, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:4616:46, 27 May 2020 diff hist +25 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:4516:45, 27 May 2020 diff hist −28 PECVD 2 (Advanced Vacuum) →Documentation
- 16:4316:43, 27 May 2020 diff hist +61 N Operating Instructions Created page with "Advanced Vacuum PECVD.pdf" current Tag: Visual edit
- 16:4016:40, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
- 16:3616:36, 27 May 2020 diff hist 0 N File:Advanced Vacuum PECVD.pdf No edit summary current
- 16:3116:31, 27 May 2020 diff hist +1 PECVD 1 (PlasmaTherm 790) →Documentation Tag: Visual edit
8 May 2020
23 April 2020
- 00:1600:16, 23 April 2020 diff hist +1 PECVD Recipes →SiN deposition (PECVD #1)
- 00:1600:16, 23 April 2020 diff hist −29 PECVD Recipes →SiN deposition (PECVD #1)
- 00:0800:08, 23 April 2020 diff hist −37 PECVD Recipes →SiO2 deposition (PECVD #1)
22 April 2020
- 23:5723:57, 22 April 2020 diff hist +57 PECVD1 Wafer Coating Process No edit summary Tag: Visual edit
- 23:5423:54, 22 April 2020 diff hist +18 Wafer Coating Process Traveler No edit summary Tag: Visual edit
- 23:5323:53, 22 April 2020 diff hist −18 Wafer Coating Process Traveler link to recipes Tag: Visual edit
- 23:5223:52, 22 April 2020 diff hist +54 Wafer Coating Process Traveler No edit summary Tag: Visual edit
- 23:5023:50, 22 April 2020 diff hist +1,475 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 23:4823:48, 22 April 2020 diff hist −8 Wafer Coating Process Traveler →STD SiO2 Tag: Visual edit
- 23:4723:47, 22 April 2020 diff hist +724 Wafer Coating Process Traveler →Standard oxide deposition Tag: Visual edit
- 23:4323:43, 22 April 2020 diff hist −7 Wafer Coating Process Traveler →STD LS Nitride2 at 300C Tag: Visual edit