User contributions for Biljana

9 October 2020

• 23:1423:14, 9 October 2020 diff hist +10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 23:1223:12, 9 October 2020 diff hist +7 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:4222:42, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:3422:34, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:3322:33, 9 October 2020 diff hist +22 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 22:0122:01, 9 October 2020 diff hist −1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5821:58, 9 October 2020 diff hist +1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5621:56, 9 October 2020 diff hist +4 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5221:52, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:1221:12, 9 October 2020 diff hist +19 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 18:4118:41, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 18:3918:39, 9 October 2020 diff hist −2 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150)
• 18:3818:38, 9 October 2020 diff hist +55 Direct-Write Lithography Recipes →Positive Resist (MLA150)

15 July 2020

• 03:5303:53, 15 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
• 03:5203:52, 15 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
• 03:4903:49, 15 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
• 03:4703:47, 15 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
• 03:4603:46, 15 July 2020 diff hist −124 PECVD Recipes →SiN deposition (PECVD #2)
• 03:4503:45, 15 July 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
• 03:4303:43, 15 July 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
• 03:4103:41, 15 July 2020 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2)
• 03:4003:40, 15 July 2020 diff hist +1 PECVD Recipes →PECVD 2 (Advanced Vacuum)

2 July 2020

• 19:0319:03, 2 July 2020 diff hist −8 Unaxis wafer coating procedure →a) Prepare wafers: Tag: Visual edit
• 19:0219:02, 2 July 2020 diff hist −20 Unaxis wafer coating procedure →1. Unaxis deposition - 300nm of  SiO2 LDR film @250°C Tag: Visual edit
• 19:0119:01, 2 July 2020 diff hist +29 Unaxis wafer coating procedure No edit summary Tag: Visual edit
• 19:0119:01, 2 July 2020 diff hist +7 Unaxis wafer coating procedure No edit summary Tag: Visual edit
• 19:0019:00, 2 July 2020 diff hist +4,199 N Unaxis wafer coating procedure Created page with "'''1. Unaxis deposition - 300nm of  SiO2 LDR film @250°C''' a) Prepare wafers: ·      Regular 4 " Si wafer ~500nm think for seasoning ·      Your substrate for d..." Tag: Visual edit
• 18:4718:47, 2 July 2020 diff hist −58 ICP-PECVD (Unaxis VLR) No edit summary Tag: Visual edit
• 18:4418:44, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
• 18:4218:42, 2 July 2020 diff hist +68 N Wafer coating procedure Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]" current Tag: Visual edit
• 18:4118:41, 2 July 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating procedure correction Tag: Visual edit
• 18:3718:37, 2 July 2020 diff hist −76 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
• 18:3618:36, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit

12 June 2020

• 05:3905:39, 12 June 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
• 05:3705:37, 12 June 2020 diff hist −125 PECVD Recipes →Thin-Film Properties
• 05:3705:37, 12 June 2020 diff hist +125 PECVD Recipes →Thin-Film Properties

27 May 2020

• 17:1217:12, 27 May 2020 diff hist −17 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 17:1217:12, 27 May 2020 diff hist +77 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 17:1017:10, 27 May 2020 diff hist +40 N File:SOP for Advanced Vacuum PECVD.pdf 5-27-2020 Biljana Stamenic current
• 17:0417:04, 27 May 2020 diff hist +49 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 17:0217:02, 27 May 2020 diff hist −58 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:5816:58, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:5816:58, 27 May 2020 diff hist −8 PECVD 2 (Advanced Vacuum) No edit summary Tag: Visual edit
• 16:5516:55, 27 May 2020 diff hist +63 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:5416:54, 27 May 2020 diff hist +6 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:5416:54, 27 May 2020 diff hist +15 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:5316:53, 27 May 2020 diff hist −91 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:4716:47, 27 May 2020 diff hist +65 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:4616:46, 27 May 2020 diff hist +4 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit
• 16:4616:46, 27 May 2020 diff hist +25 PECVD 2 (Advanced Vacuum) →Documentation Tag: Visual edit