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- 22:25, 16 February 2021 diff hist 0 PECVD Recipes →Thin-Film Properties
- 22:24, 16 February 2021 diff hist -2 PECVD Recipes →Thin-Film Properties
- 14:43, 13 November 2020 diff hist +3,288 N MLA Recipes MLa recipes- Bilja trying to link R to recipes Tag: Visual edit
- 14:21, 13 November 2020 diff hist +270 Lithography Recipes →Photolithography Recipes
- 14:16, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 14:15, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
- 16:29, 3 November 2020 diff hist -120 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -127 PECVD Recipes →SiN deposition (PECVD #2)
- 16:28, 3 November 2020 diff hist -112 PECVD Recipes →SiO2 deposition (PECVD #2)
- 12:32, 16 October 2020 diff hist +150 Stepper Recipes
- 21:28, 13 October 2020 diff hist -2 PECVD Recipes →SiO2 deposition (PECVD #1)
- 21:28, 13 October 2020 diff hist +118 PECVD Recipes →SiN deposition (PECVD #1)
- 09:38, 13 October 2020 diff hist -228 PECVD Recipes
- 09:14, 13 October 2020 diff hist -1 PECVD Recipes →Historical Particulate Data
- 09:13, 13 October 2020 diff hist +1 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
- 09:13, 13 October 2020 diff hist -109 PECVD Recipes →SiN deposition (PECVD #1)
- 16:38, 9 October 2020 diff hist -10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:37, 9 October 2020 diff hist +64 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:16, 9 October 2020 diff hist +45 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:14, 9 October 2020 diff hist +10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 16:12, 9 October 2020 diff hist +7 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:42, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:34, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
- 15:33, 9 October 2020 diff hist +22 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 15:01, 9 October 2020 diff hist -1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:58, 9 October 2020 diff hist +1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:56, 9 October 2020 diff hist +4 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:52, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 14:12, 9 October 2020 diff hist +19 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:41, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 11:39, 9 October 2020 diff hist -2 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150)
- 11:38, 9 October 2020 diff hist +55 Direct-Write Lithography Recipes →Positive Resist (MLA150)
- 20:53, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:52, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:49, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:47, 14 July 2020 diff hist 0 PECVD Recipes →Uniformity Data
- 20:46, 14 July 2020 diff hist -124 PECVD Recipes →SiN deposition (PECVD #2)
- 20:45, 14 July 2020 diff hist 0 PECVD Recipes →Thin-Film Properties
- 20:43, 14 July 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
- 20:41, 14 July 2020 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2)
- 20:40, 14 July 2020 diff hist +1 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 12:03, 2 July 2020 diff hist -8 Unaxis wafer coating procedure →a) Prepare wafers: Tag: Visual edit
- 12:02, 2 July 2020 diff hist -20 Unaxis wafer coating procedure →1. Unaxis deposition - 300nm of SiO2 LDR film @250°C Tag: Visual edit
- 12:01, 2 July 2020 diff hist +29 Unaxis wafer coating procedure Tag: Visual edit
- 12:01, 2 July 2020 diff hist +7 Unaxis wafer coating procedure Tag: Visual edit
- 12:00, 2 July 2020 diff hist +4,199 N Unaxis wafer coating procedure Created page with "'''1. Unaxis deposition - 300nm of SiO2 LDR film @250°C''' a) Prepare wafers: · Regular 4 " Si wafer ~500nm think for seasoning · Your substrate for d..." Tag: Visual edit
- 11:47, 2 July 2020 diff hist -58 ICP-PECVD (Unaxis VLR) Tag: Visual edit
- 11:44, 2 July 2020 diff hist +65 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 11:42, 2 July 2020 diff hist +68 N Wafer coating procedure Created page with "[https://wiki.nanotech.ucsb.edu/wiki/File:Unaxis_SOP_3-30-2020.docx]" current Tag: Visual edit
- 11:41, 2 July 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation: wafer coating procedure correction Tag: Visual edit