User contributions for Biljana

7 May 2021

• 16:4616:46, 7 May 2021 diff hist +151 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: reboot Tag: Visual edit
• 16:4416:44, 7 May 2021 diff hist +1,766 GCA 6300 Reboot Procedures reboot and shutdwon-start up current Tag: Visual edit
• 16:4016:40, 7 May 2021 diff hist −1,956 Troubleshooting and Recovery →What to do in case of computer (monitor) freeze-up.: rebooring Tag: Visual edit

5 May 2021

• 17:1317:13, 5 May 2021 diff hist +1,447 Troubleshooting and Recovery troublwshooting Tag: Visual edit
• 17:0117:01, 5 May 2021 diff hist +77 GCA 6300 USer Accessible Commands →List of commands: mapping command added current Tag: Visual edit

19 February 2021

• 22:4722:47, 19 February 2021 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 22:4522:45, 19 February 2021 diff hist +160 PECVD Recipes →SiO2 deposition (PECVD #2)
• 22:4422:44, 19 February 2021 diff hist +136 PECVD Recipes →Uniformity Data
• 22:4222:42, 19 February 2021 diff hist +142 PECVD Recipes →Uniformity Data
• 22:3722:37, 19 February 2021 diff hist +139 PECVD Recipes →Uniformity Data
• 22:3322:33, 19 February 2021 diff hist +176 PECVD Recipes →SiO2 deposition (PECVD #1)
• 22:3022:30, 19 February 2021 diff hist +139 PECVD Recipes →Historical Particulate Data
• 22:2922:29, 19 February 2021 diff hist +152 PECVD Recipes →Uniformity Data
• 22:2822:28, 19 February 2021 diff hist +140 PECVD Recipes →Uniformity Data

17 February 2021

• 05:3105:31, 17 February 2021 diff hist +136 PECVD Recipes →Thin-Film Properties
• 05:3005:30, 17 February 2021 diff hist +124 PECVD Recipes →Thin-Film Properties
• 05:2905:29, 17 February 2021 diff hist +119 PECVD Recipes →Thin-Film Properties
• 05:2805:28, 17 February 2021 diff hist +126 PECVD Recipes →Thin-Film Properties
• 05:2705:27, 17 February 2021 diff hist +123 PECVD Recipes →Thin-Film Properties
• 05:2505:25, 17 February 2021 diff hist 0 PECVD Recipes →Thin-Film Properties
• 05:2405:24, 17 February 2021 diff hist −2 PECVD Recipes →Thin-Film Properties

13 November 2020

• 21:4321:43, 13 November 2020 diff hist +3,288 N Direct-Write I-Line Recipes MLa recipes- Bilja trying to link R to recipes Tag: Visual edit
• 21:2121:21, 13 November 2020 diff hist +270 Lithography Recipes →Photolithography Recipes
• 21:1621:16, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes
• 21:1521:15, 13 November 2020 diff hist +40 Lithography Recipes →Photolithography Recipes

3 November 2020

• 23:2923:29, 3 November 2020 diff hist −120 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 23:2823:28, 3 November 2020 diff hist −127 PECVD Recipes →SiN deposition (PECVD #2)
• 23:2823:28, 3 November 2020 diff hist −112 PECVD Recipes →SiO2 deposition (PECVD #2)

16 October 2020

• 19:3219:32, 16 October 2020 diff hist +150 Stepper Recipes No edit summary

14 October 2020

• 04:2804:28, 14 October 2020 diff hist −2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 04:2804:28, 14 October 2020 diff hist +118 PECVD Recipes →SiN deposition (PECVD #1)

13 October 2020

• 16:3816:38, 13 October 2020 diff hist −228 PECVD Recipes No edit summary
• 16:1416:14, 13 October 2020 diff hist −1 PECVD Recipes →Historical Particulate Data
• 16:1316:13, 13 October 2020 diff hist +1 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 16:1316:13, 13 October 2020 diff hist −109 PECVD Recipes →SiN deposition (PECVD #1)

9 October 2020

• 23:3823:38, 9 October 2020 diff hist −10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 23:3723:37, 9 October 2020 diff hist +64 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 23:1623:16, 9 October 2020 diff hist +45 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 23:1423:14, 9 October 2020 diff hist +10 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 23:1223:12, 9 October 2020 diff hist +7 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:4222:42, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:3422:34, 9 October 2020 diff hist 0 Direct-Write Lithography Recipes →Negative Resist (MLA150)
• 22:3322:33, 9 October 2020 diff hist +22 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 22:0122:01, 9 October 2020 diff hist −1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5821:58, 9 October 2020 diff hist +1 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5621:56, 9 October 2020 diff hist +4 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:5221:52, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 21:1221:12, 9 October 2020 diff hist +19 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 18:4118:41, 9 October 2020 diff hist +3 Direct-Write Lithography Recipes →Positive Resist (MLA150)
• 18:3918:39, 9 October 2020 diff hist −2 Direct-Write Lithography Recipes →Maskless Aligner (Heidelberg MLA150)