User contributions for Sawyer l

11 August 2021

• 21:0821:08, 11 August 2021 diff hist −3‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation Tag: Visual edit
• 21:0721:07, 11 August 2021 diff hist +100‎ Contact Aligner (SUSS MA-6) ‎ →‎Documentation: Added BA6 SOP Tag: Visual edit
• 21:0521:05, 11 August 2021 diff hist 0‎ N File:BA6 SOP Rev A.pdf ‎No edit summary current

10 August 2021

• 21:1921:19, 10 August 2021 diff hist +153‎ Dicing Saw (ADT) ‎ →‎Operating Procedures: Add link to updated SOP Tag: Visual edit
• 21:1721:17, 10 August 2021 diff hist 0‎ N File:ADT Dicing Saw SOP Rev B.pdf ‎No edit summary current

20 July 2021

• 16:0816:08, 20 July 2021 diff hist −3‎ Dicing Saw (ADT) ‎ Contact info Tag: Visual edit
• 15:3415:34, 20 July 2021 diff hist +125‎ Stepper 2 (AutoStep 200) ‎ →‎Staff Procedures: Added restart SOP pdf link Tag: Visual edit
• 15:3315:33, 20 July 2021 diff hist 0‎ N File:Autostep 200 Restart SOP June 2021.pdf ‎No edit summary current

19 July 2021

• 20:1920:19, 19 July 2021 diff hist +124‎ Maskless Aligner (Heidelberg MLA150) ‎ →‎Design Tools/Info: Added substrate template rules visual aid Tag: Visual edit
• 20:1820:18, 19 July 2021 diff hist 0‎ N File:MLA150 Substrate Template Rules.pdf ‎No edit summary current

13 July 2021

• 17:2417:24, 13 July 2021 diff hist −31‎ Contact Aligner (SUSS MA-6) ‎ Updated SOP with BSA steps, removed old BSA steps Tag: Visual edit
• 17:2217:22, 13 July 2021 diff hist 0‎ N File:MA-6 SOP Rev D.pdf ‎No edit summary

26 May 2021

• 20:1020:10, 26 May 2021 diff hist 0‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit
• 20:0920:09, 26 May 2021 diff hist 0‎ N File:MLA150 SOP Rev I (LS).pdf ‎No edit summary current

19 April 2021

• 17:3117:31, 19 April 2021 diff hist +72‎ Film Stress (Tencor Flexus) ‎ →‎Documentation: Added SOP link Tag: Visual edit
• 17:3117:31, 19 April 2021 diff hist 0‎ N File:Tencor FLX SOP Rev B.pdf ‎No edit summary current
• 17:2917:29, 19 April 2021 diff hist +66‎ Film Stress (Tencor Flexus) ‎ Added Documentation Section Tag: Visual edit
• 17:0617:06, 19 April 2021 diff hist +68‎ Film Stress (Tencor Flexus) ‎ →‎Equipment Specifications Tag: Visual edit
• 16:3316:33, 19 April 2021 diff hist +381‎ Film Stress (Tencor Flexus) ‎ Updating Equipment Specifications Tag: Visual edit

16 March 2021

• 15:3215:32, 16 March 2021 diff hist 0‎ Maskless Aligner (Heidelberg MLA150) ‎ Updated SOP Tag: Visual edit
• 15:3115:31, 16 March 2021 diff hist 0‎ N File:MLA150 SOP Rev H (LS).pdf ‎No edit summary current

15 March 2021

• 18:2818:28, 15 March 2021 diff hist 0‎ RIE 3 (MRC) ‎ Updated SOP Tag: Visual edit
• 18:2818:28, 15 March 2021 diff hist 0‎ N File:RIE 3 SOP Rev D.pdf ‎No edit summary current

12 February 2021

• 17:3017:30, 12 February 2021 diff hist +21‎ Maskless Aligner (Heidelberg MLA150) ‎ Update SOP link Tag: Visual edit
• 17:2917:29, 12 February 2021 diff hist 0‎ N File:MLA150 SOP Rev G (LS).pdf ‎No edit summary current

30 November 2020

• 19:1919:19, 30 November 2020 diff hist −18‎ Contact Aligner (SUSS MA-6) ‎ Intensity info for CH2 updated, SOP updated Tag: Visual edit
• 19:1819:18, 30 November 2020 diff hist 0‎ N File:MA-6 SOP Rev C.pdf ‎No edit summary current

29 October 2020

• 15:1315:13, 29 October 2020 diff hist +12‎ Contact Aligner (SUSS MA-6) ‎ New SOP rev. Change Ch2 intensity info Tag: Visual edit

2 October 2020

• 16:2316:23, 2 October 2020 diff hist −3‎ Plasma Clean (YES EcoClean) ‎ updated SOP link Tag: Visual edit
• 16:2216:22, 2 October 2020 diff hist 0‎ N File:YES SOP Rev C.pdf ‎No edit summary current

23 September 2020

• 16:0116:01, 23 September 2020 diff hist +3‎ m Dicing Saw (ADT) ‎No edit summary

16 September 2020

• 18:5718:57, 16 September 2020 diff hist −68‎ Suss Aligners (SUSS MJB-3) ‎ Changed wording to reflect the downsizing to 2 aligners. Tag: Visual edit

13 September 2020

• 17:4617:46, 13 September 2020 diff hist 0‎ RIE 2 (MRC) ‎ SOP rev Tag: Visual edit
• 17:4517:45, 13 September 2020 diff hist 0‎ N File:RIE 2 SOP Rev B.pdf ‎No edit summary current

20 August 2020

• 14:3914:39, 20 August 2020 diff hist −42‎ Contact Alignment Recipes ‎ Updated MA-6 neg resist flood expose info. Tag: Visual edit

7 August 2020

• 18:5618:56, 7 August 2020 diff hist +6‎ IR Aligner (SUSS MJB-3 IR) ‎ SOP rev current Tag: Visual edit
• 18:5518:55, 7 August 2020 diff hist 0‎ N File:MJB 3 IR Camera SOP Rev B.pdf ‎No edit summary
• 18:5118:51, 7 August 2020 diff hist 0‎ File:MJB 3 IR Camera SOP.pdf ‎ Sawyer l uploaded a new version of File:MJB 3 IR Camera SOP.pdf current

1 August 2020

• 16:5516:55, 1 August 2020 diff hist 0‎ RIE 3 (MRC) ‎ updated SOP link Tag: Visual edit
• 16:5516:55, 1 August 2020 diff hist 0‎ N File:RIE 3 SOP Rev C.pdf ‎No edit summary current

16 July 2020

• 17:0217:02, 16 July 2020 diff hist −749‎ IR Aligner (SUSS MJB-3 IR) ‎ System information Tag: Visual edit
• 16:5416:54, 16 July 2020 diff hist +111‎ IR Aligner (SUSS MJB-3 IR) ‎ added additional documentation Tag: Visual edit
• 16:5316:53, 16 July 2020 diff hist 0‎ N File:MJB 3 IR Camera SOP.pdf ‎No edit summary
• 16:5216:52, 16 July 2020 diff hist +129‎ IR Aligner (SUSS MJB-3 IR) ‎ added additional documentation Tag: Visual edit
• 16:5116:51, 16 July 2020 diff hist 0‎ N File:MJB 3 IR Alignment Mode Conversion.pdf ‎No edit summary current

6 March 2020

• 00:3400:34, 6 March 2020 diff hist 0‎ RIE 3 (MRC) ‎ updated SOP link Tag: Visual edit
• 00:3300:33, 6 March 2020 diff hist 0‎ N File:RIE 3 SOP Rev B.pdf ‎No edit summary current

26 February 2020

• 19:2019:20, 26 February 2020 diff hist +1‎ E-Beam 2 (Custom) ‎No edit summary
• 19:1819:18, 26 February 2020 diff hist −153‎ Plasma Clean (YES EcoClean) ‎No edit summary
• 19:1419:14, 26 February 2020 diff hist +47‎ Plasma Clean (YES EcoClean) ‎No edit summary