User contributions for John d

23 January 2023

• 21:4621:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
• 18:2918:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
• 18:2718:27, 23 January 2023 diff hist −5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
• 18:2618:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler No edit summary Tag: Visual edit
• 18:2418:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
• 16:1216:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit

20 January 2023

• 20:0020:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
• 19:5919:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
• 19:5619:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
• 19:5019:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
• 19:4919:49, 20 January 2023 diff hist +831 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to ND's new Google sheets SPC data, removed "old" data, added example SPC image with link to gSheets Tag: Visual edit: Switched
• 19:4619:46, 20 January 2023 diff hist +39 N File:Oxford-ICP-Etch Process Control Data Example.jpg No edit summary current
• 19:3919:39, 20 January 2023 diff hist +713 Process Group - Process Control Data →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
• 19:3719:37, 20 January 2023 diff hist +551 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): link to google sheets SPC, added example plot w/ link to sheets, removed "Old data" Tag: Visual edit: Switched
• 19:3419:34, 20 January 2023 diff hist +38 N File:ICP2 Process Control Data Example.jpg No edit summary
• 19:3019:30, 20 January 2023 diff hist +46 m ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added CLeaning recipes "to be added" Tag: Visual edit
• 19:2919:29, 20 January 2023 diff hist −2 m ICP Etching Recipes →Process Control Data (Panasonic 1)
• 19:2919:29, 20 January 2023 diff hist −2 m Process Group - Process Control Data →Panasonic ICP #1
• 19:2819:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched
• 19:2619:26, 20 January 2023 diff hist +214 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): re-added example chart with links to charts
• 19:2119:21, 20 January 2023 diff hist +2 ICP Etching Recipes →SiO2 Etch with CHF3/CF4 - Process Control Data (Panasonic 1): fixed links
• 19:2019:20, 20 January 2023 diff hist −4 m ICP Etching Recipes →Process Control Data (Panasonic 1) Tag: Visual edit
• 19:1919:19, 20 January 2023 diff hist +109 ICP Etching Recipes →Process Control Data (Panasonic 1): added `link=` URL to gsheets plots
• 19:1819:18, 20 January 2023 diff hist +486 ICP Etching Recipes →Process Control Data (Panasonic 1): lin to ND's google sheets data, added example image of SPC chart Tag: Visual edit
• 19:1619:16, 20 January 2023 diff hist +47 N File:ICP1 Process Control Data Example.jpg No edit summary current
• 19:1019:10, 20 January 2023 diff hist +92 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (Fluorine ICP Etcher): inserted example chart with link to data Tag: Visual edit
• 19:0919:09, 20 January 2023 diff hist +29 Process Group - Process Control Data →Etching (Process Control Data): formatted OLD data Tag: Visual edit
• 19:0619:06, 20 January 2023 diff hist +58 N File:FL-ICP Process Control Data Example.jpg No edit summary current
• 19:0319:03, 20 January 2023 diff hist +13 ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): corected toolname in header title Tag: Visual edit
• 19:0019:00, 20 January 2023 diff hist −61 m Process Group - Process Control Data →PlasmaTherm SLR Fluorine Etcher: fixed link to plot Tag: Visual edit
• 19:0019:00, 20 January 2023 diff hist +1 m ICP Etching Recipes →SiO2 Etching with CHF3/CF4 (FL-ICP): fixed plot link Tag: Visual edit
• 18:4618:46, 20 January 2023 diff hist +411 Process Group - Process Control Data →Etching (Process Control Data): link to FL-ICP google sheets (noahD) Tag: Visual edit
• 18:4518:45, 20 January 2023 diff hist +414 ICP Etching Recipes →Process Control Data (Fluorine ICP Etcher): linked to Noah's google sheets - plots & data Tag: Visual edit

19 January 2023

• 23:3723:37, 19 January 2023 diff hist +151 Template:Announcements blue-M oven down
• 23:3523:35, 19 January 2023 diff hist +276 Template:Announcements stepper 2 maint.
• 23:0123:01, 19 January 2023 diff hist +151 Template:Announcements stepper 1 PM

18 January 2023

• 22:5822:58, 18 January 2023 diff hist +1 m ICP Etch 2 (Panasonic E626I) →Online Training Video: Tag: Visual edit
• 22:5722:57, 18 January 2023 diff hist +17 ICP Etch 2 (Panasonic E626I) Made "online training" into a section heading, so it's obvious in Table of Contents. Also change "page title" levels to "header" level. Tag: Visual edit

13 January 2023

• 04:5604:56, 13 January 2023 diff hist −113 Template:Announcements updated OPEN annc

12 January 2023

• 22:3822:38, 12 January 2023 diff hist +108 Oxford ICP Etcher - Process Control Data added chamber wet clean current Tag: Visual edit

11 January 2023

• 15:3315:33, 11 January 2023 diff hist −194 Template:Announcements nanofab open for LN2 delivery

10 January 2023

• 23:2823:28, 10 January 2023 diff hist +66 Template:Announcements LN2 closure

7 January 2023

• 00:2000:20, 7 January 2023 diff hist +7 Oxford ICP Etcher - Process Control Data →Etch Rate Dependence on Sample Size (Oxford ICP Etcher): changed name to emphasize Sampel Size effect Tag: Visual edit

6 January 2023

• 18:2818:28, 6 January 2023 diff hist +170 Process Group - Process Control Data →ICP-PECVD (Unaxis VLR Dep): link to SiO2/SiN plots separately Tag: Visual edit
• 00:0700:07, 6 January 2023 diff hist +464 Template:News added info about process control data

5 January 2023

• 17:4317:43, 5 January 2023 diff hist +182 PECVD Recipes →ICP-PECVD (Unaxis VLR): added "geenral recipe notes" Tag: Visual edit

4 January 2023

• 02:2202:22, 4 January 2023 diff hist +126 Wet Benches →Develop Benches: added megasonic Tag: Visual edit
• 01:5301:53, 4 January 2023 diff hist +66 Wafer Bonder (SUSS SB6-8E) →Detailed Specifications: link to MA6 Tag: Visual edit
• 00:4100:41, 4 January 2023 diff hist −21 m Suss Aligners (SUSS MJB-3) →Optical Spectrum with Filter for i-line Exposure Tag: Visual edit
• 00:4000:40, 4 January 2023 diff hist +170 Suss Aligners (SUSS MJB-3) added alignment marks GDS file, made optical spectra smaller. Tag: Visual edit