User contributions for Biljana
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22 December 2023
- 00:1900:19, 22 December 2023 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 00:1800:18, 22 December 2023 diff hist +6 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 00:1700:17, 22 December 2023 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 00:1600:16, 22 December 2023 diff hist +30 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 00:1400:14, 22 December 2023 diff hist 0 N File:SURFSCAN 6200 Small substrates.pdf No edit summary current
- 00:1400:14, 22 December 2023 diff hist 0 N File:SURFSCAN 6200 2 and 3inch wafers.pdf No edit summary current
- 00:1300:13, 22 December 2023 diff hist 0 N File:SURFSCAN 6200 4inch wafers.pdf No edit summary current
- 00:1200:12, 22 December 2023 diff hist +409 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
21 December 2023
- 23:0323:03, 21 December 2023 diff hist +109 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 23:0123:01, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 6inch wafers.pdf No edit summary current
- 22:5922:59, 21 December 2023 diff hist 0 N File:SURFSCAN 6200 8inch wafers.pdf No edit summary current
- 22:5222:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 22:5222:52, 21 December 2023 diff hist 0 Stepper 1 (GCA 6300) →Operating Procedures
- 22:5222:52, 21 December 2023 diff hist −33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:4822:48, 21 December 2023 diff hist +33 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:4722:47, 21 December 2023 diff hist −115 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:4722:47, 21 December 2023 diff hist −80 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit: Switched
- 22:4522:45, 21 December 2023 diff hist +98 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes Tag: Visual edit
- 22:4322:43, 21 December 2023 diff hist +97 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:4122:41, 21 December 2023 diff hist −119 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:4122:41, 21 December 2023 diff hist +8 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:3922:39, 21 December 2023 diff hist +111 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:3622:36, 21 December 2023 diff hist −138 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:3522:35, 21 December 2023 diff hist +13 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:3122:31, 21 December 2023 diff hist +100 Surface Analysis (KLA/Tencor Surfscan) →Standard Recipes
- 22:2922:29, 21 December 2023 diff hist +22 Surface Analysis (KLA/Tencor Surfscan) No edit summary Tag: Visual edit: Switched
- 22:2822:28, 21 December 2023 diff hist +18 Surface Analysis (KLA/Tencor Surfscan) →About Tag: Visual edit
- 22:2722:27, 21 December 2023 diff hist −1 Surface Analysis (KLA/Tencor Surfscan) →Documentation
20 December 2023
- 17:2817:28, 20 December 2023 diff hist +1 PECVD Recipes No edit summary Tag: Visual edit: Switched
15 December 2023
- 18:1218:12, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:1118:11, 15 December 2023 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:1118:11, 15 December 2023 diff hist −6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0318:03, 15 December 2023 diff hist +6 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0318:03, 15 December 2023 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0218:02, 15 December 2023 diff hist −4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0218:02, 15 December 2023 diff hist −4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0118:01, 15 December 2023 diff hist +5 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 18:0018:00, 15 December 2023 diff hist +222 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 17:5717:57, 15 December 2023 diff hist +1 PECVD Recipes →=SiN deposition (PECVD #2)
- 17:5517:55, 15 December 2023 diff hist +195 PECVD Recipes →SiN deposition (PECVD #2)
- 17:5317:53, 15 December 2023 diff hist +4 PECVD Recipes →SiO2 deposition (PECVD #2)
- 17:5217:52, 15 December 2023 diff hist +130 PECVD Recipes →SiO2 deposition (PECVD #2)
- 17:3817:38, 15 December 2023 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 17:3617:36, 15 December 2023 diff hist +49 PECVD Recipes →SiO2 deposition (PECVD #2): New recipe from Nov. 2023 Tag: Visual edit
13 September 2023
- 20:3920:39, 13 September 2023 diff hist +627 Stepper 2 (Autostep 200) - Table of Chucks, Shims, Target Thicknesses Added info for a new shim current Tag: Visual edit
- 20:1720:17, 13 September 2023 diff hist +39 Stepper 2 (Autostep 200) - Chuck Selection Adding a new chuck current Tag: Visual edit
18 January 2023
- 23:4923:49, 18 January 2023 diff hist +226 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 23:4823:48, 18 January 2023 diff hist +208 PECVD Recipes →Si3N4 [ICP-PECVD]
- 23:4723:47, 18 January 2023 diff hist +219 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 23:4623:46, 18 January 2023 diff hist +8 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]