User contributions for Biljana
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27 September 2024
- 18:3718:37, 27 September 2024 diff hist +146 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3418:34, 27 September 2024 diff hist −11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3318:33, 27 September 2024 diff hist +11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3218:32, 27 September 2024 diff hist −211 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3218:32, 27 September 2024 diff hist +212 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:2718:27, 27 September 2024 diff hist +21 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:1517:15, 27 September 2024 diff hist −15 PECVD Recipes →Standard Clean Recipe
- 17:1517:15, 27 September 2024 diff hist −1 PECVD Recipes →Standard Clean Recipe
- 17:1517:15, 27 September 2024 diff hist +140 PECVD Recipes →Standard Clean Recipe
- 17:1417:14, 27 September 2024 diff hist −105 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1317:13, 27 September 2024 diff hist +132 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1217:12, 27 September 2024 diff hist +15 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1217:12, 27 September 2024 diff hist +2 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1117:11, 27 September 2024 diff hist +1 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 17:1117:11, 27 September 2024 diff hist −1 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1017:10, 27 September 2024 diff hist +483 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 17:0217:02, 27 September 2024 diff hist +15 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 17:0017:00, 27 September 2024 diff hist +15 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 16:5316:53, 27 September 2024 diff hist +20 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 16:5016:50, 27 September 2024 diff hist −219 PECVD Recipes →Si3N4 [ICP-PECVD]: Updated recipe since August 2024 Tag: Visual edit
- 16:4916:49, 27 September 2024 diff hist +229 PECVD Recipes →Si3N4 [ICP-PECVD]
30 August 2024
- 22:1422:14, 30 August 2024 diff hist +258 Wet Etching Recipes →Table of Wet Etching Recipes
- 22:1222:12, 30 August 2024 diff hist +1 Wet Etching Recipes →Table of Wet Etching Recipes
- 22:1122:11, 30 August 2024 diff hist +8 Wet Etching Recipes →Table of Wet Etching Recipes
- 22:1022:10, 30 August 2024 diff hist +18 Wet Etching Recipes →Table of Wet Etching Recipes
- 22:0822:08, 30 August 2024 diff hist +59 Wet Etching Recipes →Table of Wet Etching Recipes
- 22:0322:03, 30 August 2024 diff hist +544 Wet Etching Recipes →Table of Wet Etching Recipes: Added UnaxisVLR films and BHF etch rates Tag: Visual edit
- 21:3621:36, 30 August 2024 diff hist −26 Wet Etching Recipes →Table of Wet Etching Recipes: Corrected BHF etch rates for PECVD1/PECVD2 films and IBD. Tag: Visual edit
13 August 2024
- 19:0619:06, 13 August 2024 diff hist +374 Unaxis wafer coating procedure →Unaxis SiO2 Low Dep. Rate @250C deposition current Tag: Visual edit
- 18:5618:56, 13 August 2024 diff hist −16 Unaxis wafer coating procedure Gain 4 added Tag: Visual edit
4 June 2024
- 22:2722:27, 4 June 2024 diff hist +249 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 22:2522:25, 4 June 2024 diff hist +229 PECVD Recipes →Si3N4 [ICP-PECVD]
- 22:2422:24, 4 June 2024 diff hist −1 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 22:2422:24, 4 June 2024 diff hist +241 PECVD Recipes →High Deposition Rate SiO2 [ICP-PECVD]
- 22:2222:22, 4 June 2024 diff hist +31 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
- 22:2122:21, 4 June 2024 diff hist +211 PECVD Recipes →Low Deposition Rate SiO2 [ICP-PECVD]
24 May 2024
- 17:5617:56, 24 May 2024 diff hist +194 MLA Recipes →Positive Resist (MLA150)
- 17:4217:42, 24 May 2024 diff hist −1 MLA Recipes →Greyscale Lithography (MLA150)
- 17:3217:32, 24 May 2024 diff hist +67 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2917:29, 24 May 2024 diff hist +17 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2917:29, 24 May 2024 diff hist +3 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2817:28, 24 May 2024 diff hist +5 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2817:28, 24 May 2024 diff hist +20 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2717:27, 24 May 2024 diff hist −2 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2717:27, 24 May 2024 diff hist +17 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2317:23, 24 May 2024 diff hist +75 MLA Recipes →Greyscale Lithography (MLA150)
- 17:2117:21, 24 May 2024 diff hist +4 MLA Recipes →Greyscale Lithography (MLA150)
- 17:1817:18, 24 May 2024 diff hist +3 MLA Recipes →Greyscale Lithography (MLA150)
- 17:1817:18, 24 May 2024 diff hist +90 MLA Recipes →Greyscale Lithography (MLA150)
- 17:1317:13, 24 May 2024 diff hist −158 MLA Recipes →Positive Resist (MLA150)