User contributions for Biljana
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8 November 2024
- 19:1019:10, 8 November 2024 diff hist +149 Wet Etching Recipes →Table of Wet Etching Recipes: BHF:DI =1:100 etch rate for ALD -SiO2 BDEAS film Tag: Visual edit
6 November 2024
- 21:4321:43, 6 November 2024 diff hist +38 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 1): Added (BHF:DI=1:100) etch rate Tag: Visual edit
17 October 2024
- 17:0017:00, 17 October 2024 diff hist +13 Atomic Layer Deposition Recipes →SiO{{sub|2}} deposition (ALD CHAMBER 1)
- 16:5916:59, 17 October 2024 diff hist +35 Atomic Layer Deposition Recipes →SiO{{sub|2}} deposition (ALD CHAMBER 1)
3 October 2024
- 17:5917:59, 3 October 2024 diff hist −90 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5817:58, 3 October 2024 diff hist +90 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5317:53, 3 October 2024 diff hist −107 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5317:53, 3 October 2024 diff hist +104 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5117:51, 3 October 2024 diff hist −91 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5017:50, 3 October 2024 diff hist −1 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:4917:49, 3 October 2024 diff hist +3 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:4517:45, 3 October 2024 diff hist −4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:3617:36, 3 October 2024 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:3417:34, 3 October 2024 diff hist +91 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
30 September 2024
- 21:2421:24, 30 September 2024 diff hist +4 PECVD Recipes →Gap-Fill SiO2 [ICP-PECVD]
- 20:5320:53, 30 September 2024 diff hist +38 PECVD Recipes →Gap-Fill SiO2 [ICP-PECVD]
27 September 2024
- 19:0719:07, 27 September 2024 diff hist +2 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0719:07, 27 September 2024 diff hist −3 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0619:06, 27 September 2024 diff hist −29 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0619:06, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0519:05, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0519:05, 27 September 2024 diff hist +70 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0419:04, 27 September 2024 diff hist +150 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4618:46, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4518:45, 27 September 2024 diff hist +28 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist −150 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist −13 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4218:42, 27 September 2024 diff hist +1 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4118:41, 27 September 2024 diff hist −2 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4118:41, 27 September 2024 diff hist −103 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3918:39, 27 September 2024 diff hist +74 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3818:38, 27 September 2024 diff hist +5 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3818:38, 27 September 2024 diff hist −49 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3718:37, 27 September 2024 diff hist +146 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3418:34, 27 September 2024 diff hist −11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3318:33, 27 September 2024 diff hist +11 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3218:32, 27 September 2024 diff hist −211 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3218:32, 27 September 2024 diff hist +212 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:2718:27, 27 September 2024 diff hist +21 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:1517:15, 27 September 2024 diff hist −15 PECVD Recipes →Standard Clean Recipe
- 17:1517:15, 27 September 2024 diff hist −1 PECVD Recipes →Standard Clean Recipe
- 17:1517:15, 27 September 2024 diff hist +140 PECVD Recipes →Standard Clean Recipe
- 17:1417:14, 27 September 2024 diff hist −105 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1317:13, 27 September 2024 diff hist +132 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1217:12, 27 September 2024 diff hist +15 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1217:12, 27 September 2024 diff hist +2 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1117:11, 27 September 2024 diff hist +1 PECVD Recipes →Low Stress Si3N4 [ICP-PECVD]
- 17:1117:11, 27 September 2024 diff hist −1 PECVD Recipes →Standard Seasoning Procedure [ICP-PECVD]
- 17:1017:10, 27 September 2024 diff hist +483 PECVD Recipes →ICP-PECVD (Unaxis VLR)