User contributions for Biljana
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20 November 2024
- 22:4622:46, 20 November 2024 diff hist 0 N File:SURFSCAN 6200 241120 small substrates.pdf No edit summary current
- 22:4522:45, 20 November 2024 diff hist 0 N File:SURFSCAN 6200 241120 for 8inch wafers.pdf No edit summary current
- 22:4422:44, 20 November 2024 diff hist 0 N File:SURFSCAN 6200 241120 for 6inch wafers.pdf No edit summary current
- 22:4422:44, 20 November 2024 diff hist 0 N File:SURFSCAN 6200 241120 for 4inch wafers.pdf No edit summary current
18 November 2024
15 November 2024
- 00:4200:42, 15 November 2024 diff hist +5 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 1) Tag: Visual edit
- 00:4100:41, 15 November 2024 diff hist −1 Atomic Layer Deposition Recipes →Al{{sub|2}}O{{sub|3}} deposition (ALD CHAMBER 3)
- 00:4000:40, 15 November 2024 diff hist +126 Atomic Layer Deposition Recipes →Al2O3 deposition (ALD CHAMBER 3): updated ALD Al2O3 dep. rate Tag: Visual edit
12 November 2024
- 19:2119:21, 12 November 2024 diff hist −2 Lithography Recipes →Process Ranking Table
- 19:2019:20, 12 November 2024 diff hist −1 MLA Recipes →Positive Resist (MLA150) current Tag: Visual edit
- 19:1919:19, 12 November 2024 diff hist −2 Lithography Recipes →Process Ranking Table
- 19:1919:19, 12 November 2024 diff hist +47 Lithography Recipes →Process Ranking Table
- 19:1219:12, 12 November 2024 diff hist 0 MLA Recipes →Positive Resist (MLA150) Tag: Visual edit
- 19:1019:10, 12 November 2024 diff hist +179 Direct-Write Lithography Recipes →Positive Resist (MLA150): Update for SPR 955-1.8 current Tag: Visual edit
- 19:0019:00, 12 November 2024 diff hist +1 Lithography Recipes →Photolithography Recipes Tag: Visual edit
- 18:5318:53, 12 November 2024 diff hist +178 MLA Recipes →Positive Resist (MLA150): MLA Info about SPR955-1.8 Tag: Visual edit
8 November 2024
- 19:1019:10, 8 November 2024 diff hist +149 Wet Etching Recipes →Table of Wet Etching Recipes: BHF:DI =1:100 etch rate for ALD -SiO2 BDEAS film Tag: Visual edit
6 November 2024
- 21:4321:43, 6 November 2024 diff hist +38 Atomic Layer Deposition Recipes →SiO2 deposition (ALD CHAMBER 1): Added (BHF:DI=1:100) etch rate Tag: Visual edit
17 October 2024
- 17:0017:00, 17 October 2024 diff hist +13 Atomic Layer Deposition Recipes →SiO{{sub|2}} deposition (ALD CHAMBER 1)
- 16:5916:59, 17 October 2024 diff hist +35 Atomic Layer Deposition Recipes →SiO{{sub|2}} deposition (ALD CHAMBER 1)
3 October 2024
- 17:5917:59, 3 October 2024 diff hist −90 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5817:58, 3 October 2024 diff hist +90 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5317:53, 3 October 2024 diff hist −107 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5317:53, 3 October 2024 diff hist +104 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5117:51, 3 October 2024 diff hist −91 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:5017:50, 3 October 2024 diff hist −1 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:4917:49, 3 October 2024 diff hist +3 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:4517:45, 3 October 2024 diff hist −4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:3617:36, 3 October 2024 diff hist +4 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 17:3417:34, 3 October 2024 diff hist +91 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
30 September 2024
- 21:2421:24, 30 September 2024 diff hist +4 PECVD Recipes →Gap-Fill SiO2 [ICP-PECVD]
- 20:5320:53, 30 September 2024 diff hist +38 PECVD Recipes →Gap-Fill SiO2 [ICP-PECVD]
27 September 2024
- 19:0719:07, 27 September 2024 diff hist +2 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0719:07, 27 September 2024 diff hist −3 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0619:06, 27 September 2024 diff hist −29 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0619:06, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0519:05, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0519:05, 27 September 2024 diff hist +70 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 19:0419:04, 27 September 2024 diff hist +150 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4618:46, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4518:45, 27 September 2024 diff hist +28 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist −150 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist 0 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4318:43, 27 September 2024 diff hist −13 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4218:42, 27 September 2024 diff hist +1 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4118:41, 27 September 2024 diff hist −2 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:4118:41, 27 September 2024 diff hist −103 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3918:39, 27 September 2024 diff hist +74 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3818:38, 27 September 2024 diff hist +5 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures
- 18:3818:38, 27 September 2024 diff hist −49 Surface Analysis (KLA/Tencor Surfscan) →Operating Procedures