User contributions for Noahdutra

Results for Noahdutra talk block log uploads logs

A user with 331 edits. Account created on 2 July 2022.

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17:1417:14, 24 July 2025 diff hist +122 SEM 1 (JEOL IT800SHL) →Operating Procedures: Added CalTech Resource on SEM imaging concepts in "operating procedures" section at bottom of page Tag: Visual edit

00:1100:11, 23 July 2025 diff hist +1 Process Group Interns edited intern dates Tag: Visual edit

23:1923:19, 18 July 2025 diff hist +110 Process Group Interns →Alumni: Updated Interns Tag: Visual edit

21:4821:48, 15 July 2025 diff hist −27 Noah Dutra →About: Changed About slightly current Tag: Visual edit

17:4417:44, 5 March 2025 diff hist 0 Dry Etching Recipes Added R6 for GaAs etch on ICP2 Tag: Visual edit

01:1601:16, 6 February 2025 diff hist −62 Noah Dutra No edit summary Tag: Visual edit

17:0617:06, 20 December 2024 diff hist +63 Noah Dutra →About: Added "About" Section Tag: Visual edit

23:0423:04, 27 November 2024 diff hist +46 Oxford ICP Etcher (PlasmaPro 100 Cobra) →GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for GaN Tag: Visual edit
23:0323:03, 27 November 2024 diff hist +46 ICP Etching Recipes →Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added recipe name for GaN Tag: Visual edit
22:5722:57, 27 November 2024 diff hist +46 Process Group - Process Control Data →GaN Etch (Cl2/BCl3/Ar/200°C): Added recipe name for public GaN etch Tag: Visual edit
21:2921:29, 27 November 2024 diff hist +128 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher): Added Image Tag: Visual edit
21:2521:25, 27 November 2024 diff hist +42 N File:Dot Facet 00.jpg GaN etch, credit: Gopi Meena current
21:2321:23, 27 November 2024 diff hist +511 ICP Etching Recipes →Process Control Data for "GaN Etch" (Cl2/BCl3/Ar/200°C): Added GaN Tag: Visual edit
21:2221:22, 27 November 2024 diff hist +509 Oxford ICP Etcher (PlasmaPro 100 Cobra) →GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit
21:2021:20, 27 November 2024 diff hist −102 Process Group - Process Control Data →GaN Etch (Cl2/BCl3/Ar/200°C) Tag: Visual edit
21:1921:19, 27 November 2024 diff hist +170 Process Group - Process Control Data →GaN Etch (Cl2/BCl3/Ar/200°C)
21:1021:10, 27 November 2024 diff hist +465 Process Group - Process Control Data →GaN Etch (Cl2/BCl3/Ar/200°C): Added things to GaN etch SPC Tag: Visual edit
21:0221:02, 27 November 2024 diff hist +48 N File:GaN SPC.png GaN SPC chart for etch cal on OXFD current
20:4820:48, 27 November 2024 diff hist 0 Dry Etching Recipes changed OXFD GaN etch to R6 Tag: Visual edit

21:5721:57, 7 November 2024 diff hist +94 Vacuum Deposition Recipes Added AuSn to Thermal evap 2 Tag: Visual edit
21:4921:49, 7 November 2024 diff hist −2,440 Vacuum Deposition Recipes changing thermal evaps to be correct Tag: Visual edit

23:5823:58, 30 October 2024 diff hist −55 Vacuum Deposition Recipes No edit summary Tag: Visual edit

00:4100:41, 22 October 2024 diff hist 0 Dry Etching Recipes Changed FICP Si to R6 and OXFD GaN to R3 Tag: Visual edit

23:3923:39, 9 October 2024 diff hist −30 ICP Etching Recipes →Process Control Data (DSEiii): took off SiO2/Al2O3 selectivity for dse Tag: Visual edit

21:2921:29, 8 October 2024 diff hist −1 ICP Etching Recipes →Process Control Data (DSEiii): more details for the etch Tag: Visual edit
21:0321:03, 8 October 2024 diff hist +52 N File:Cal DSE Ar+ER.png DSE STD_Bosch_Si etch AR/ER dependence current
21:0121:01, 8 October 2024 diff hist +124 ICP Etching Recipes →Process Control Data (DSEiii)
20:5920:59, 8 October 2024 diff hist +124 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher)
20:5720:57, 8 October 2024 diff hist −124 ICP Etching Recipes →Si Etching (Fluorine ICP Etcher)
20:5420:54, 8 October 2024 diff hist −94 ICP Etching Recipes →Process Control Data (DSEiii)
20:5420:54, 8 October 2024 diff hist +94 ICP Etching Recipes →Process Control Data (DSEiii)
20:5120:51, 8 October 2024 diff hist −106 ICP Etching Recipes →Process Control Data (DSEiii)
20:4920:49, 8 October 2024 diff hist +106 ICP Etching Recipes →Process Control Data (DSEiii)
20:4720:47, 8 October 2024 diff hist −93 ICP Etching Recipes →DSEIII_(PlasmaTherm/Deep_Silicon_Etcher): DSE calibration etch information Tag: Visual edit
20:4420:44, 8 October 2024 diff hist +42 N File:DSE 16um Bosch Etch - 22 013.jpg STD_Bosch_Si example 8/26/24
20:4220:42, 8 October 2024 diff hist +39 N File:30D 003.jpg STD_Bosch_Si etch picture current
20:3720:37, 8 October 2024 diff hist +38 N File:DSE plot.png Calibration plot for DSE current
20:3320:33, 8 October 2024 diff hist +1,340 ICP Etching Recipes →High Rate Bosch Etch (DSEIII): Preliminary changes to DSE site Tag: Visual edit
20:3220:32, 8 October 2024 diff hist +151 N File:Cal vs Legacy DSE.png Legacy DSE Si etch (Plasma-Therm Standard DSE) vs new Calibration Si etch (STD_Bosch_Si) looking at Etch rate dependence on Aspect Ratio. current

22:3122:31, 4 October 2024 diff hist 0 Dry Etching Recipes changed Oxford GaAs to R2 since we have no data, but there is a recipe on the tool. Tag: Visual edit

17:3217:32, 2 October 2024 diff hist +223 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Process Control Data: added picture to this page for Si etch Tag: Visual edit

16:3616:36, 30 September 2024 diff hist +157 ICP Etching Recipes Added a photo attributed to the SiVertHFv2 cal recipe Tag: Visual edit
16:2316:23, 30 September 2024 diff hist +34 N File:PRStrip 019 (1).jpg Si Etch FICP 9/19/24 current
16:1516:15, 30 September 2024 diff hist +23 N File:PRStrip 022 (1).jpg No edit summary current

11:4711:47, 16 September 2024 diff hist −111 Noah Dutra No edit summary Tag: Visual edit

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