OLD - PECVD2 Recipes

PECVD 2 (Advanced Vacuum)

Photos

• Dirty platen

SiN deposition (PECVD #2)

• Nitride2 Standard Recipe
• Nitride2 Data October 2014
• Nitride2 Thickness uniformity 2014

• Deposition Rate: ≈ 7.99 nm/min (users must calibrate this prior to critical deps)
• Refractive Index: ≈ 1.958
• Stress ≈ 495MPa
• HF etch rate:~49nm/min

SiO₂ deposition (PECVD #2)

• Oxide Standard Recipe
• Oxide Data October 2014
• Oxide Thickness uniformity 2014

• Deposition Rate: ≈ 28.50 nm/min (users must calibrate this prior to critical deps)
• Refractive Index: ≈ 1.474
• Stress ≈ -259MPa
• HF etch rate~626nm/min

LS SiN deposition (PECVD #2)

• LS Nitride2 Standard Recipe
• LS Nitride2 Data October 2014

• LS Nitride2 Thickness uniformity 2014

• Deposition Rate: ≈ 7.96 nm/min (users must calibrate this prior to critical deps)
• Refractive Index: ≈ 1.937
• Stress ≈ 2.77MPa
• HF etch rate~47nm/min

Amorphous-Si deposition (PECVD #2)

• Amorphous Si Deposition Recipe