PECVD1 Recipes

PECVD 1 (PlasmaTherm 790)

SiN deposition (PECVD #1)

• SiN Standard Recipe
• SiN Data 2014
• SiN 1000A Thickness uniformity 2014

SiO₂ deposition (PECVD #1)

• SiO₂ Standard Recipe
• SiO₂ Data 2014
• SiO₂ 1000A Thickness uniformity 2014

Other recipes (PECVD#1)

• Low Stress Si₃N₄ - Variable Stress Recipes
• Low Stress Si₃N₄ - Variable Stress Plot
• SiO_xN_y Recipe
• SiO_xN_y Data 2014
• SiO_xN_y 3000A Thickness uniformity 2014
• LS SiN Recipe
• LS SiN Data 2014
• LS SiN 3000A Thickness uniformity 2014