Surface Analysis (KLA/Tencor Surfscan)

Tool Type	Inspection, Test and Characterization
Location	Bay 5
Supervisor	Biljana Stamenic
Supervisor Phone	(805) 893-4002
Supervisor E-Mail	biljana@ece.ucsb.edu

Description	?
Manufacturer	Tencor

About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.

Documentation