RIE Etching Recipes

Back to Dry Etching Recipes.

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

• CdZnTe Etch Recipes - CH₄-H₂-Ar

ZnS Etching (RIE 2)

• ZnS Etch Recipe - CH₄-H₂-Ar

ITO Etching (RIE 2)

• ITO Etch Recipes - CH₄-H₂-Ar

InP-InGaAsP-InGaAlAs Etching (RIE 2)

• InP-InGaAsP-InAlGaAs Etch Recipes - CH₄-H₂-Ar

RIE 3 (MRC)

SiO₂ Etching (RIE 3)

• SiO₂ Etch Recipe with a very low surface damage - CHF₃

SiN_x Etching (RIE 3)

• [[media:|SiN_x Etch Recipe with a very low surface damage - CHF_3]]

RIE 5 (PlasmaTherm)

AlGaAs\GaAs Etching (RIE 5)

• GaAs\AlGaAs Etch Recipes - BCl₃-SiCl₄

GaN Etching (RIE 5)

• GaN Etch Recipes - Cl₂-BCl₃-Ar