ASML Stepper 3 - UCSB Test Reticles
Reticle ID: "UCSB-OPC1"
This reticle is always installed in the system, in the "System Reticles" Box #1.
Alignment Markers
| Image ID | Image Size
X , Y (Wafer, mm) |
Image Shift
X , Y (Wafer, mm) |
Notes/Description | Schematics |
|---|---|---|---|---|
| GCA_Align | 0.530000 , 0.140000 | -6.750000 , 9.450000 | ImageShift references the center of the -X- "global" mark.
The ==||| "Local" mark is X+200µm to the right has 1.1mm margin on all sides |
White is Chrome, Pattern is Clear
|
| Multi-Purpose Alignment Mark - Positive | 0.900000 , 0.900000 | -6.750000 , -9.450000 | ImageShift is the center coords of the larger "+" mark
Smaller "+" mark is (0.225,-0.225)mm down-right 0.925mm margin on all sides >> Use this for Dicing Alginment Guides |
White is Chrome, Pattern is Clear
|
| Multi-Purpose Alignment Mark - Negative | 0.710000 , 0.710000 | 6.750000 , -9.450000 | ImageShift is the center coords of the larger "+" mark
Smaller "+" mark is (0.225,-0.225)mm down-right Blank (masked) space on left+top sides 1.0mm margin on all sides |
Striped area is Clear
|
| Contact_Mark | 0.564000 , 0.564000 | 6.750000 , 9.450000 | ImageShift references the center of the contact alignment mark "+"
with 1.1mm margin on all sides |
White is Chrome, Striped area is Clear
|
Resolution Test Charts
The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.
In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_... patterns are for calibrating the OPC algorithm, and are not for user analysis.
Calibration Chart Layout
Cell name is "UCSB_Cal", with coordinates below pointing to center of this cell.
Resolution Chart Schematic
"resolution_chart_ORIG" cell in the above.
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:
Coords for "UCSB_Cal" Calibration Patterns
Each of the above "UCSB_Cal" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "UCSB_Cal" cell):
| Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
|---|---|---|
| 2.610000 , 2.610000 | -9.450000 | 12.150000 |
| same as above | -6.750000 | 12.150000 |
| " " | -4.050000 | 12.150000 |
| " " | -1.350000 | 12.150000 |
| " " | 1.350000 | 12.150000 |
| " " | 4.050000 | 12.150000 |
| " " | 6.750000 | 12.150000 |
| " " | 9.450000 | 12.150000 |
| -9.450000 | 9.450000 | |
| Alignment Marker | ||
| -4.050000 | 9.450000 | |
| -1.350000 | 9.450000 | |
| 1.350000 | 9.450000 | |
| 4.050000 | 9.450000 | |
| Alignment Marker | ||
| 9.450000 | 9.450000 | |
| -9.450000 | 6.750000 | |
| -6.750000 | 6.750000 | |
| -4.050000 | 6.750000 | |
| -1.350000 | 6.750000 | |
| 1.350000 | 6.750000 | |
| 4.050000 | 6.750000 | |
| 6.750000 | 6.750000 | |
| 9.450000 | 6.750000 | |
| -9.450000 | 4.050000 | |
| -6.750000 | 4.050000 | |
| -4.050000 | 4.050000 | |
| -1.350000 | 4.050000 | |
| 1.350000 | 4.050000 | |
| 4.050000 | 4.050000 | |
| 6.750000 | 4.050000 | |
| 9.450000 | 4.050000 | |
| -9.450000 | 1.350000 | |
| -6.750000 | 1.350000 | |
| -4.050000 | 1.350000 | |
| -1.350000 | 1.350000 | |
| 1.350000 | 1.350000 | |
| 4.050000 | 1.350000 | |
| 6.750000 | 1.350000 | |
| 9.450000 | 1.350000 | |
| -9.450000 | -1.350000 | |
| -6.750000 | -1.350000 | |
| -4.050000 | -1.350000 | |
| -1.350000 | -1.350000 | |
| 1.350000 | -1.350000 | |
| 4.050000 | -1.350000 | |
| 6.750000 | -1.350000 | |
| 9.450000 | -1.350000 | |
| -9.450000 | -4.050000 | |
| -6.750000 | -4.050000 | |
| -4.050000 | -4.050000 | |
| -1.350000 | -4.050000 | |
| 1.350000 | -4.050000 | |
| 4.050000 | -4.050000 | |
| 6.750000 | -4.050000 | |
| 9.450000 | -4.050000 | |
| -9.450000 | -6.750000 | |
| -6.750000 | -6.750000 | |
| -4.050000 | -6.750000 | |
| -1.350000 | -6.750000 | |
| 1.350000 | -6.750000 | |
| 4.050000 | -6.750000 | |
| 6.750000 | -6.750000 | |
| 9.450000 | -6.750000 | |
| -9.450000 | -9.450000 | |
| Alignment Marker | ||
| -4.050000 | -9.450000 | |
| -1.350000 | -9.450000 | |
| 1.350000 | -9.450000 | |
| 4.050000 | -9.450000 | |
| Alignment Marker | ||
| 9.450000 | -9.450000 | |
| -9.450000 | -12.150000 | |
| -6.750000 | -12.150000 | |
| -4.050000 | -12.150000 | |
| -1.350000 | -12.150000 | |
| 1.350000 | -12.150000 | |
| 4.050000 | -12.150000 | |
| 6.750000 | -12.150000 | |
| 9.450000 | -12.150000 | |