ASML Stepper 3 - UCSB Test Reticles

Reticle ID: "UCSB-OPC1"

This reticle is always installed in the system, in the "System Reticles" Box #1.

Alignment Markers

Image ID	Image Size X , Y (Wafer, mm)	Image Shift X , Y (Wafer, mm)	Notes/Description	Schematics
GCA_Align	0.530000 , 0.140000	-6.750000 , 9.450000	ImageShift references the center of the -X- "global" mark. The ==||| "Local" mark is X+200µm to the right has 1.1mm margin on all sides	White is Chrome, Pattern is Clear
E-Beam Litho Alignment Mark - Positive	0.900000 , 0.900000	-6.750000 , -9.450000	ImageShift is the center coords of the larger "+" mark Smaller "+" mark is (0.225,-0.225)mm down-right 0.925mm margin on all sides >> Use this for Dicing Alginment Guides	White is Chrome, Pattern is Clear
E-Beam Litho Alignment Mark - Negative	0.710000 , 0.710000	6.750000 , -9.450000	ImageShift is the center coords of the larger "+" mark Smaller "+" mark is (0.225,-0.225)mm down-right Blank (masked) space on left+top sides 1.0mm margin on all sides	Striped area is Clear
Contact_Mark	0.564000 , 0.564000	6.750000 , 9.450000	ImageShift references the center of the contact alignment mark "+" with 1.1mm margin on all sides	White is Chrome, Striped area is Clear

Resolution Test Charts

The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.

In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_... patterns are for calibrating the OPC algorithm, and are not for user analysis.

Calibration Chart Layout

Cell name is "UCSB_Cal", with coordinates below pointing to center of this cell.

Layout of the repeating calibration charts

Resolution Chart Schematic

"resolution_chart_ORIG" cell in the above.

Resolution Chart Layout, with res. test from 2.00µm to 0.130µm

The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:

OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm

Coords for "UCSB_Cal" Calibration Patterns

Each of the above "UCSB_Cal" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "UCSB_Cal" cell):

Image Size X , Y (Wafer, mm)	Image Shift X (Wafer, mm)	Image Shift Y (Wafer, mm)
2.610000 , 2.610000	-9.450000	12.150000
same as above	-6.750000	12.150000
" "	-4.050000	12.150000
" "	-1.350000	12.150000
" "	1.350000	12.150000
" "	4.050000	12.150000
" "	6.750000	12.150000
" "	9.450000	12.150000
	-9.450000	9.450000
	Alignment Marker
	-4.050000	9.450000
	-1.350000	9.450000
	1.350000	9.450000
	4.050000	9.450000
	Alignment Marker
	9.450000	9.450000
	-9.450000	6.750000
	-6.750000	6.750000
	-4.050000	6.750000
	-1.350000	6.750000
	1.350000	6.750000
	4.050000	6.750000
	6.750000	6.750000
	9.450000	6.750000
	-9.450000	4.050000
	-6.750000	4.050000
	-4.050000	4.050000
	-1.350000	4.050000
	1.350000	4.050000
	4.050000	4.050000
	6.750000	4.050000
	9.450000	4.050000
	-9.450000	1.350000
	-6.750000	1.350000
	-4.050000	1.350000
	-1.350000	1.350000
	1.350000	1.350000
	4.050000	1.350000
	6.750000	1.350000
	9.450000	1.350000
	-9.450000	-1.350000
	-6.750000	-1.350000
	-4.050000	-1.350000
	-1.350000	-1.350000
	1.350000	-1.350000
	4.050000	-1.350000
	6.750000	-1.350000
	9.450000	-1.350000
	-9.450000	-4.050000
	-6.750000	-4.050000
	-4.050000	-4.050000
	-1.350000	-4.050000
	1.350000	-4.050000
	4.050000	-4.050000
	6.750000	-4.050000
	9.450000	-4.050000
	-9.450000	-6.750000
	-6.750000	-6.750000
	-4.050000	-6.750000
	-1.350000	-6.750000
	1.350000	-6.750000
	4.050000	-6.750000
	6.750000	-6.750000
	9.450000	-6.750000
	-9.450000	-9.450000
	Alignment Marker
	-4.050000	-9.450000
	-1.350000	-9.450000
	1.350000	-9.450000
	4.050000	-9.450000
	Alignment Marker
	9.450000	-9.450000
	-9.450000	-12.150000
	-6.750000	-12.150000
	-4.050000	-12.150000
	-1.350000	-12.150000
	1.350000	-12.150000
	4.050000	-12.150000
	6.750000	-12.150000
	9.450000	-12.150000