Deep UV Optical Microscope (Olympus)

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Deep UV Optical Microscope (Olympus)
UVOlympus.jpg
Tool Type Inspection, Test and Characterization
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description
Manufacturer Olympus
Model MX61A-DUV


About

This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250nm light. Surface features less than 100nm can be resolved. The system has precision stage control and is fully computer controlled for image capture and sample manipulation. A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.

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