Stepper 2 (Autostep 200) - Chuck Selection
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| AUTOSTEP 200 CHUCKS | ||
|---|---|---|
| Chuck Name / Wafer Size | Substrate Thickness | Chuck Thickness |
| 1/4 of 2" | 500 um | 11.646 mm |
| 2" | 500 um | 11.650 mm |
| 100mm (or 4") | 500 um | 11.630 mm |
| 1/4 of 2" | 635 um | 11.536 mm |
| 76.2mm (or 3") | 635 um | 11.570 mm |
| Al 100 mm | 635 um | 11.570 mm |
| Black Multi | 720 um | 11.440 mm |
| TARGET THICKNESS: 12.150mm +/- 0.1mm( 100um) | ||
| Target Thickness = Chuck Thickness + Wafer Thickness | ||
| Limits on Height/Focus Display ( +/-6V), Ideal ≈ 0V | ||
| NOTE: DO NOT OVER TIGHTEN SCREWS! | ||
| Please be careful tightening the screws when you use the shims with the stepper chucks. It is easy to over tighten the screws and strip out the chucks. Also, if you notice a screw head is being stripped, please discard the screw and use a new one. | ||