Deep UV Optical Microscope (Olympus)

Deep UV Optical Microscope (Olympus) Tool Type Inspection, Test and Characterization Location Bay 7 Supervisor Tony Bosch Supervisor Phone (805) 893-3486 Supervisor E-Mail bosch@ece.ucsb.edu Description Deep-Ultraviolet (250nm) Microscope Manufacturer Olympus Model MX61A-DUV

About

This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.

The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.

A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.

Detailed Specifications

• Microscope Objectives:
  • 5x, 10x, 20x, 50x, 100x, DUV-100x
• Software Control:
  • Motorized Stage & Objective Turret
  • Calibrated Measurements (calibrations fixed)
  • Z-motor (focus height) measurement
• Filters:
  • Bright Field / Dark Field (visible only)

Examples

100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.