Surface Analysis (KLA/Tencor Surfscan)
Revision as of 15:19, 31 March 2020 by Biljana (talk | contribs) (→Documentation: wafer scanning process traveler)
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches.
Documentation
- Standard Operating Procedure
- Operations Manual
- For detailed measurement info, it is highly recommended that you read the manual.
- Surfscan Info
- Wafer scanning process traveler