Bill Millerski
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Bill Millerski
Position
Senior Equipment Engineer
Room Number
1109F
Phone
(805) 839-2655
E-Mail
wmillerski@ucsb.edu
About
.
.
.
Tools
Bill Millerski is the supervisor for the following tools.
Atomic Layer Deposition (Oxford FlexAL)
Stepper 1 (GCA 6300)
Stepper 2 (AutoStep 200)
Ion Beam Deposition (Veeco NEXUS)
RIE 5 (PlasmaTherm)
Rapid Thermal Processor (AET RX6)
Rapid Thermal Processor (SSI Solaris 150)
Step Profilometer (KLA Tencor P-7)
Chemical-Mechanical Polisher (Logitech)
XeF2 Etch (Xetch)
Mechanical Polisher (Allied)
Tube Furnace Wafer Bonding (Thermco)
E-Beam 1 (Sharon)
Resistivity Mapper (CDE RESMAP)
Optical Film Thickness (Nanometric)
Vapor HF Etch
Wafer Bonder (Logitech WBS7)
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