Step Profilometer (KLA Tencor P-7)

Step Profilometer (KLA Tencor P-7) Location Bay 4 Tool Type Inspection, Test and Characterization Manufacturer KLA Tencor Description Surface Profilometer Primary Supervisor Bill Millerski (805) 893-2655 wmillerski@ucsb.edu Secondary Supervisor Aidan Hopkins Recipes

About

The KLA-Tencor P7 profilometer is a stylus profilometer that drags a stylus across the wafer surface with controlled pressure, aligned via microcope, and measures the step-heights of surface features during the measurement. The system has a motor-controlled stage for X/Y/Rotation, and is typically used to measure step heights in single areas on various sample sizes frmo small pieces to 4-inch wafers. It can be programmed to scan multiple locations on a single wafer or 3D areas topography.

Detailed Specifications

• Probe Tip has a 2um radius and a 60 degree angle
• Maximum wafer size: ____
• 1D Profile and 2D Raster Scanning
• Lateral Resolution: _____
• Height Resolution: _____

Instructions

• Basic profile instructions
• Saving+Extracting Profile Data