Other Dry Etching Recipes

Back to Dry Etching Recipes.

XeF2 Etch (Xetch)

• Si Etch Recipe

Vapor HF Etch (uETCH)

• SiO₂ Etch Recipe 1
• SiO₂ Etch Recipe 2

CAIBE (Oxford Ion Mill)

• Reminder: From now on, one should always use P_RF=200W! (see supervisor for explanation)
• Pt Etch Recipe
• Au Etch Recipe
• Ni Etch Recipe
• InP Etch Recipe