Template:Announcements

DSE is Up

We’ve run a day and a half of different recipes and haven’t seen a single issue. The standard DSE (Bosch) process has been qualified and everything is consistent with previous runs. For sensitive etches it’s recommended to do a test run to check for any process drift. Tool is free to use. //Vraj Mehalana 14:17, 1 March 2024 (PST)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

PlasmaTherm DSEIII is down - Update

We were able to start running recipes last night but we found the C4F8 MFC wasn’t controlling. I’ve ordered a new MFC that’s due to be on site Tuesday morning. If all goes well the tool should be up that afternoon. //Demis D. John 11:18, 23 February 2024 (PST)

ICP #1 is down - Update

Some additional work is needed on the replacement board that we are waiting on. I have been informed that it will not be shipping until after the 20th (no solid date). //Demis D. John 11:18, 23 February 2024 (PST)

RIE 5 is up

RIE 5 is up except for processes that use SiCl4. //Vraj Mehalana 09:39, 30 January 2024 (PST)

EBeam3 Transfer Arm Upgrade - Postponed

The Transfer Arm upgrade has been postponed again, this time due to motor driver compatibility issues.

I am waiting to hear back from the manufacturer so at this time I can not reschedule yet.

I will send another notification when everything has been worked out, and I am ready to schedule the installation. //Demis D. John 11:56, 13 February 2024 (PST)

Job Opening: Process Engineer

The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.

//Demis D. John 14:52, 30 October 2023 (PDT)

Lab Access Changes: Symmetry App

Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App". // John d 13:49, 7 November 2023 (PST)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)