Surfscan SOP for 4inch wafers
Important Guidelines
● Wafer Thickness: Do not use wafers thicker than 1 mm.
● Log all scans and issues in the logbook.
● Always log off after completing your session.
Procedure
1. Login Instructions
● Use the password: fab (new password)
● If the keyboard isn’t working, use the virtual keyboard on the monitor.
● Double-click the SCAN icon.
3. Loading a Recipe
- Click Recipe > Load.
- Select a standard recipe for 4-inch wafers:
○ UCSB GAIN4 0.16-1.6 (for 0.16-1.6 µm).
○ UCSB GAIN2 1.6-28 (for 1.6-28 µm).
- Click OK. The recipe name will appear at the top.
4. Modify Recipe
- Select Recipe > Save as, and rename it (e.g., your name or company name).
- Go to Recipe/View/Modify to adjust parameters:
○ Wafer diameter, edge exclusion, gain, threshold, indexer, etc.
- Under Bin Split, click Default Bin to apply changes.
- Save the modifications.
5. Load Wafers into the Cassette
- Use the white cassette for 4-inch wafers (right indexer).
- Load wafers face up, with the major flat away from you.
- Place the cassette properly in the right indexer.
6. Start Scanning
- On the monitor, select CASS (Cassette) and wait for the tool to detect wafers.
- Choose one of the following:
○ Single Wafer: Select the wafer and click START (upper bar).
○ Multiple Wafers: Select AUTO, then click START.
- Record the scan results.
7. Completion
- Once scanning is complete:
○ Press ENTER on the small laptop to save the scan as a photo:
■ Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.
○ Photos can be accessed/downloaded via the Nanofab server.
○ Note: Full data-saving functionality will be available in January 2025.
- Click HOME, then select RECIPE/Exit, and log off.
8. Log Book
● Record details of your scan and any issues in the Log Book.