Surfscan SOP for small substrates
IMPORTANT: Mount Substrates on a 4” Carrier Wafer
● Use a drop of water to mount the substrate onto the 4” wafer.
● Ensure total thickness (carrier + substrate) is ~1 mm.
Steps
1. Log In
● Access Code: fab [new password from 2025].
● If the keyboard isn’t functional, use the virtual keyboard on the monitor.
2. Launch the Software
● Double-click the SCAN icon.
3. Load a Recipe
- Select Recipe > Load (top-left corner).
- Choose:
○ UCSB GAIN4 0.16-1.6 (for 0.16-1.6 µm).
○ UCSB GAIN2 1.6-28 (for 1.6-28 µm).
- Press OK (recipe name will display at the top).
4. Modify Recipe
- Select Recipe > Save as, and rename the recipe (e.g., your name/company name).
- Go to Recipe/View/Modify to adjust:
○ Wafer diameter for 2”/3” wafers.
○ Edge exclusion (exclude areas outside the substrate).
○ Other parameters: gain, threshold, indexer, etc.
- Under Bin Split, click Default Bin to apply updates.
- Save the changes.
5. Mount the Substrate
- Apply a small drop of water to the center of a 4” carrier wafer.
- Position the substrate over the water drop, center it, and ensure it is secure and immobile.
6. Load the Wafer
- Place the 4” carrier wafer with the mounted substrate into the right indexer cassette (substrate facing up).
- Verify the cassette is properly seated.
7. Scanning
- On the monitor, select CASS (Cassette) and wait for the tool to detect wafers.
- To scan:
○ Single Wafer: Select the wafer, click START (upper bar), and record results.
○ Multiple Wafers: Select AUTO, then click START.
8. Completion
- Once the scan is finished:
○ Press ENTER on the small laptop to save data as a photo:
■ Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.
○ Photos can be accessed/downloaded via the Nanofab server.
○ Note: A feature to save full scan data will be available in January 2025.
- Click HOME, then select RECIPE/Exit, and log off.
9. Log Book
● Record scan details and note any issues in the Log Book.
Reminder: Always log off after using the tool!