Surfscan SOP for 6inch wafers
Important Guidelines
● Wafer Thickness: Do not use wafers thicker than 1 mm.
● Log all scans and issues in the logbook.
● Always log off after completing your session.
Procedure
1. Login Instructions
· Access Code: fab (new password from 2025).
● If the keyboard isn’t functional, use the virtual keyboard on the monitor.
● Double-click the SCAN icon to launch the software.
2. Loading a Recipe
- Navigate to Recipe > Load (upper-left corner).
- Select one of the standard recipes for 6-inch wafers:
○ STD_UCSB_6inch_G4: For thicknesses 0.16–1.6 µm.
○ STD_UCSB_6inch_G2: For thicknesses 1.6–28 µm.
- Click OK. The recipe name will appear at the top of the screen.
3. Customizing a Recipe
- Select Recipe > Save as and name the recipe (e.g., your name or company name).
- Go to Recipe > View/Modify to adjust parameters:
○ Wafer diameter
○ Edge exclusion
○ Gain
○ Threshold
- Under Bin Split, click Default Bin to apply changes.
- Save the updated recipe.
4. Load Wafers into the Cassette
- Use the white cassette for 6-inch wafers.
- Load wafers with the face up; the major flat can face either direction.
- Secure the cassette in the right indexer (specific for 6-inch wafers).
- On the monitor, select CASS (Cassette) and wait for the tool to detect the wafers.
5. Start Scanning
To Scan a Single Wafer:
● Select the desired wafer from the monitor.
● Click START (upper menu bar).
● Wait for the scan to finish and record the results.
To Scan Multiple Wafers:
● Select AUTO mode.
● Click START to begin scanning all wafers in the cassette.
6. Completion
- Once the scan is complete:
○ Press ENTER on the small laptop to save the scan as a photo.
○ Location: Desktop/Local Disk(C)/Users/Public/Public Documentation.
○ Photos can be accessed/downloaded via the Nanofab server.
○ Note: Full data-saving functionality will be available in January 2025.
- Click HOME, select RECIPE/Exit, and log off.
7. Log Book
● Ensure the cassette is properly seated in the right indexer.
● Always log off after completing your session.