Lab Open
Hello All,
Following the campus-wide power shutoff,
The fab is open but the following equipment still has lingering issues:
Unaxis ICP-PECVD - Main computer is not coming up
ALD/CAIBE - All chambers down. Bill is still working on it.
Fluorine Etcher - Will remain down until it can be addressed Monday.
EB3 - Cryo regen failed, on second regen so should come up later.
GCA Autostep - Having computer issues.
The ALD/CABE and EB3 have a more than fair chance of coming back up today. Bill will have those updates along with the status of the Autostep. The Unaxis and Fluorine etcher will not be coming up until sometime next week at the earliest.
Best,
Tony Bosch
// Demis D. John 21:37, 28 March 2025 (UTC)
RIE #5 is up
We found a burnt wire in the system controller. System is ready to use.
//Vraj Mehalana 17:51, 26 March 2025 (UTC)
EVG - Scheduled downtime
I am looking at sending that generator on the week of the 24th or 31st. It should not take that long, but I would plan for it to be down for 3 weeks.
Please let me know if this does not work for you or if you prefer one week over the other.
-Lee
//Vraj Mehalana 17:50, 26 March 2025 (UTC)
Raith Velion Down
There is a fault with the laser interferometer stage on the Raith Velion FIB. I have contacted Raith service for advice on how to proceed, I will send an update when I know more. The tool is down until further notice.
//Vraj Mehalana 17:49, 26 March 2025 (UTC)
New Gowns: Toolbelts purchases
We are required to switch to new gowns in January. The new gowns won’t have pockets, but you are allowed to purchase cleanroom tool belts. Please ask staff for which tool belts you can purchase.
Two vendors for cleanroom belts we are using are listed here, you may request others:
// Demis D. John 03:34, 3 January 2025 (UTC)
Suss SB6-8E
We found a blown resistor (and a questionable op amp) on one of the boards that contains the z-axis motor circuit. However, we still cannot get the tool to initialize. Next we will try swapping out the hard drive again and run some more tests.
I will send out an update once we have one.
-Aidan
// Demis D. John 00:35, 8 December 2024 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//Vraj Mehalana 14:17, 1 March 2024 (PST)
