Sputtering Recipes
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Vacuum Deposition Recipes
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Contents
1
Sputter 1 (Custom)
2
Sputter 2 (SFI Endeavor)
3
Sputter 3 (AJA ATC 2000-F)
4
Sputter 4 (AJA ATC 2200-V)
5
Sputter 5 (Lesker AXXIS)
6
Ion Beam Deposition (Veeco NEXUS)
6.1
SiO
2
deposition (IBD)
6.2
SiN deposition (IBD)
6.3
Ta
2
O
5
deposition (IBD)
Sputter 1 (Custom)
Sputter 2 (SFI Endeavor)
Sputter 3 (AJA ATC 2000-F)
Sputter 4 (AJA ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Ion Beam Deposition (Veeco NEXUS)
SiO
2
deposition (IBD)
SiO
2
dep
SiN deposition (IBD)
SiN Film Data (IBD)
SiN Recipe Details (IBD)
Ta
2
O
5
deposition (IBD)
Ta
2
O
5
dep
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