Sputtering Recipes

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Back to Vacuum Deposition Recipes.

Sputter 1 (Custom)

Sputter 2 (SFI Endeavor)

Sputter 3 (AJA ATC 2000-F)

Sputter 4 (AJA ATC 2200-V)

Sputter 5 (Lesker AXXIS)

Ion Beam Deposition (Veeco NEXUS)

SiO₂ deposition (IBD)

SiO₂ dep

SiN deposition (IBD)

Ta₂O₅ deposition (IBD)

Ta₂O₅ dep

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Recipes