Sputtering Recipes

Back to Vacuum Deposition Recipes.

Ion Beam Deposition (Veeco NEXUS)

SiO₂ deposition (IBD)

• SiO₂ dep

SiN deposition (IBD)

• SiN Recipe (IBD)
• SiN Film Data (IBD)
• SiN Recipe Details (IBD)

Ta₂O₅ deposition (IBD)

• Ta₂O₅ dep

TiO₂ deposition (IBD)

• TiO₂ dep