RIE Etching Recipes

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Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

CdZnTe Etch Recipes - CH₄-H₂-Ar

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

AlGaAs Etching (RIE 5)

AlGaAs Etch Recipes - BCl₃-SiCl₄

GaN Etching (RIE 5)

GaN Etch Recipes - Cl₂-BCl₃-Ar

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Recipes