RIE Etching Recipes

From UCSB Nanofab Wiki

Revision as of 00:05, 24 October 2013 by Thibeault (talk | contribs) (→‎RIE 2 (MRC))

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

CdZnTe Etch Recipes - CH₄-H₂-Ar

ITO Etching (RIE 2)

ITO Etch Recipes - CH₄-H₂-Ar

InP-InGaAsP-InGaAlAs Etching (RIE 2)

InP-InGaAsP-InAlGaAs Etch Recipes - CH₄-H₂-Ar

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

AlGaAs Etching (RIE 5)

AlGaAs Etch Recipes - BCl₃-SiCl₄

GaN Etching (RIE 5)

GaN Etch Recipes - Cl₂-BCl₃-Ar

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=RIE_Etching_Recipes&oldid=3153"

Recipes