E-Beam Evaporation Recipes

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E-Beam 1 (Sharon)

Materials Table (E-Beam #1)

Materials Table
Material	Position	Hearth / Crucible	Film Number	Density	Z Ratio	Tooling	Comments
Ag	4	C	5	10.5	0.524	140	Brian, could you please check this table? Z ratio should be 0.529
Al	2	C	6	2.7	1.080	118
Al2O3	1	C	6	3.97	0.50	169	Z-ratio should be 0.336
Au	4	C	4	19.3	0.381	138	Bazookas can be used at 20-30Å/sec.
AuGe	3	C	5	17.63	0.397	151	Composition unpredictable unless you practically empty the crucible.
Cr	3	H	6	7.2	0.305	140	Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe				7.86	0.349
Ge	3	C	6	5.35	0.516	130
MgO	1		6	3.58	0.411
Mo				10.2	0.257	140
Ni	1	H	1	8.91	0.331	140	Prone to spitting. Cool down for 15 minutes before venting.
NiCr	1	H	6	8.23	0.321		Density 8.52, z ratio 0.3258
Nb	4	C	6	8.57	0.516 ( should be 0.492)		Cool down for at least 35 minutes before venting.
Pd	1	H	9	12.0	0.357	140
Pt	1	C	8	21.40	0.245	140	Prone to spitting. Evaporate at 1.5Å/sec or less.
Si	2	H	2	2.32	0.712	150	Cool down very slowly after evaporating lest you crack the source.
SiO		C	6	2.13	0.87	132
SiO2	1	C	6	2.2 ( should be 2.648)	1.07 ( should be 1.000)	140	Please change the crystal and the upper mirror after evaporating oxide.
SrF2	1	C	6	4.28	0.727	140
Ta	1	H	6	16.6	0.262		Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W	1	C	6	19.3	0.163	138
Ti	3	H	3	4.50	0.628	139

E-Beam 2 (Custom)

Materials Table (E-Beam #2)

Materials Table
Material	Density, g/cm3	Z Ratio	Tooling factor, %	Comments
Al2O3	3.97	0.336	140.0	Tony could you please check this?
GeO2	6.24	1.000	139.0
ITO	7.16	1.000	139.0	Density should be 6.43-7.14, z ratio?
MgO	3.58	0.411	157.6	OK
Si	2.32	0.712	150.0
SiO2	2.20	1.070	157.6	Should be 2.648, z ratio 1.000
SiOx	2.13	0.87	130.0
SrF2	4.28	0.727	140.0
Ta2O5	8.2	0.30	157.6
TiO2	4.26	0.400	139.0

E-Beam 3 (Temescal)

Materials Table (E-Beam #3)

Materials Table
Material	Gun	Hearth /Crucible	Process Gain, A/sec/%pwr	Film Number	Density, g/cm3	Z Ratio	Tooling, %	Comments
Ag	Rear	C	10.0	2	10.50	0.529	67
Al	Rear	C	10.0	1	2.70	1.080	53
Au	Front	C	2.0	3	19.30	0.381	56
Ge	Rear	C	10.0	3	5.35	0.516	80
Ni	Front	C	0.5	2	8.91	0.331	67
Pd	Rear	C	0.9	4	12.038	0.357	48
Pt	Front	C	0.4	1	21.40	0.245	67
Ti	Front	C	5.0	4	4.50	0.628	67

E-Beam 4 (CHA)

Materials Table (E-Beam #4)

Materials Table
Material	Density, g/cm3	Z Ratio	Master tooling, %	Process Gain, A/sec/%pwr	Comments
Ag	10.50	0.529	110	10.0	Tony, could you please check this?
Al	2.70	1.080	165	6.0
Au	19.30	0.381	120	10.0
Co	8.90	0.343	150	5.0
Cr	7.20	0.305	140	10.0
Fe	7.86	0.349	165	10.0
Ge	5.35	0.516	126	10.0
Hf	13.09	0.360	150	10.0
Ir	22.40	0.129	130	10.0
Ni	8.91	0.331	150	5.0
NiCr	8.23	0.321	140	10.0	density should be 8.50, z ratio 0.3258
NiFe	8.70	1.000	100	10.0
Pd	12.038	0.357	112	10.0
Pt	21.40	0.245	130	10.0
Ru	12.362	0.182	100	10.0
Ti	4.50	0.628	183	10.0
Zr	6.49	0.600	150	10.0