Vacuum Deposition Recipes
From UCSB Nanofab Wiki
Revision as of 00:13, 18 August 2014 by
Jcrode
(
talk
|
contribs
)
(
diff
)
← Older revision
|
Latest revision
(
diff
) |
Newer revision →
(
diff
)
Jump to navigation
Jump to search
R
= Recipe is available. Clicking this link will take you to the recipe.
A
= Material is available for use, but no recipes are provided.
Vacuum Deposition Recipes
E-Beam Evaporation
Sputtering
Thermal Evaporation
Plasma Enhanced Chemical
Vapor Deposition (PECVD)
Atomic Layer Deposition
Molecular Vapor Deposition
Material
E-Beam 1 (Sharon)
E-Beam 2 (Custom)
E-Beam 3 (Temescal)
E-Beam 4 (CHA)
Sputter 1 (Custom)
Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Ion Beam
Deposition (Tool)
Thermal
Evap 1
Thermal Evap 2 (Solder)
PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD
Atomic Layer Deposition (Tool)
Molecular Vapor Deposition (Tool)
Ag
A
A
A
Al
A
A
A
R1
Al
2
O
3
A
A
A
R1
AlN
R1
A
R1
Au
A
A
A
R1
B
Co
A
Cr
A
Cu
Fe
A
Ge
A
A
A
GeO
2
A
Hf
A
HfO
2
R1
In
Ir
A
ITO
A
A
MgO
A
Mo
Nb
Ni
A
A
A
R1
NiCr
A
NiFe
A
Pd
A
A
A
Pt
A
A
A
Ru
A
Si
A
A
R1
R1
SiN
A
R1
R1
R1
R1
SiO
2
A
R1
R1
R1
R1
R1
SiO
x
N
y
A
R
R
Sn
SrF
2
A
Ta
R1
Ta
2
O
5
A
R1
Ti
A
A
A
TiN
A
TiO
2
A
R1
R1
R1
V
W
R1
Zn
ZnO
2
Zr
A
ZrO
2
R1
Material
E-Beam 1 (Sharon)
E-Beam 2 (Custom)
E-Beam 3 (Temescal)
E-Beam 4 (CHA)
Sputter 1 (Custom)
Sputter 2
(SFI Endeavor)
Sputter 3
(ATC 2000-F)
Sputter 4
(ATC 2200-V)
Sputter 5 (Lesker AXXIS)
Ion Beam
Deposition (Tool)
Thermal
Evap 1
Thermal Evap 2 (Solder)
PECVD 1
(PlasmaTherm 790)
PECVD 2
(Advanced Vacuum)
Unaxis VLR ICP-PECVD
Atomic Layer Deposition (Tool)
Molecular Vapor Deposition (Tool)
Category
:
Processing
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
English
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information