Vacuum Deposition Recipes

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• A = Material is available for use, but no recipes are provided.

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering						Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag	A		A	A
Al	A		A	A		R1
Al2O3	A	A								A						R1
AlN						R1				A						R1
Au	A		A	A		R1
B
Co				A
Cr				A
Cu
Fe				A
Ge	A		A	A
GeO2		A
Hf				A
HfO2																R1
In
Ir				A
ITO		A								A
MgO		A
Mo
Nb
Ni	A		A	A			R1
NiCr				A
NiFe				A
Pd	A		A	A
Pt	A		A	A
Ru	A			A
Si		A	A											R1	R1
SiN	A									R1			R1	R1	R1
SiO2		A								R1			R1	R1	R1	R1
SiOxNy		A								R			R
Sn
SrF2		A
Ta							R1
Ta2O5				A						R1
Ti	A		A	A
TiN										A
TiO2		A				R1				R1						R1
V
W								R1
Zn
ZnO2
Zr				A
ZrO2																R1
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)