Difference between revisions of "ASML 5500: Recovering from an Error"

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(initial, copied from "recover from reticle ID typo")
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Revision as of 13:33, 19 March 2018

  1. Do NOT exit task streaming!
    1. If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
  2. Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
  3. In the following popup window, click "Remove Wafer from Litho Cluster"
  4. Wait for the task status to change from "Aborting" to "Aborted"

Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list.

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