Difference between revisions of "Dicing Saw (ADT)"
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==Detailed Specifications== | ==Detailed Specifications== | ||
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| + | * Maximum Wafer Size: 8" | ||
| + | * Parts mounted to UV-release tape for cutting | ||
| + | * Automated cut maps at multiple angles (0° and 90° typical) | ||
| + | * ~few micron alignment to on-wafer features. | ||
| + | * Thermocarbon Resnoid dicing blades provided by staff | ||
==Operating Procedures== | ==Operating Procedures== | ||
*[https://wiki.nanotech.ucsb.edu/w/images/5/57/ADT_SOP_Rev_D.pdf ADT Dicing Saw Standard Operating Procedure] | *[https://wiki.nanotech.ucsb.edu/w/images/5/57/ADT_SOP_Rev_D.pdf ADT Dicing Saw Standard Operating Procedure] | ||
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*[[ADT 7100 - Recovering an Old Recipe (2019)|Recovering an Old Recipe]] | *[[ADT 7100 - Recovering an Old Recipe (2019)|Recovering an Old Recipe]] | ||
Revision as of 10:26, 23 September 2021
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About
The ADT 7100 Dicing Saw is optimized for multi-angle dicing of thin, tight tolerance products up to 200 mm x 200 mm. It is currently setup for dicing up to 8” diameter wafers. Check the Dicing Saw Recipes page for the blades we currently stock.
An ADT WM-966 tape applicator & Ultron Systems UH104-8 UV lamp system is used to apply UV-release tape for securing die during dicing.
Contact the tool supervisor for blades and dicing frames for your group.
Detailed Specifications
- Maximum Wafer Size: 8"
- Parts mounted to UV-release tape for cutting
- Automated cut maps at multiple angles (0° and 90° typical)
- ~few micron alignment to on-wafer features.
- Thermocarbon Resnoid dicing blades provided by staff
Operating Procedures
Recipes
- Recipes > Packaging > Dicing Saw Recipes (ADT 7100)
Be sure to also see the recipes for protecting your sample from dicing dust, and mounting/unmounting.