Difference between revisions of "Dry Etching Recipes"
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(link to Fluorine etcher Ru-masked SiO2 etch.) |
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+ | |{{rl|ICP Etching Recipes|SiO2 Etching (Fluorine ICP Etcher)}} |
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 1)}} |
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 1)}} |
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|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 2)}} |
|{{rl|ICP Etching Recipes|SiO2 Etching (Panasonic 2)}} |
Revision as of 16:32, 4 February 2021
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.