Dry Etching Recipes
From UCSB Nanofab Wiki
Revision as of 14:14, 22 September 2017 by
John d
(
talk
|
contribs
)
(Added Ta2O5 etching, described in paper by Blumenthal Group.)
(
diff
)
← Older revision
|
Latest revision
(
diff
) |
Newer revision →
(
diff
)
Jump to navigation
Jump to search
R
= Recipe is available. Clicking this link will take you to the recipe.
A
= Material is available for use, but no recipes are provided.
Dry Etching Recipes
RIE Etching
ICP Etching
Oxygen Plasma Systems
Other Dry Etchers
Material
RIE 1
(Retired)
RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
Si Deep RIE
(PTI/Bosch)
ICP Etch 1
(Panasonic 1)
ICP Etch 2
(Panasonic 2)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
UV Ozone Reactor
Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)
Ag
Al
A
R
R
Au
R
Cr
A
R
A
Cu
Ge
Mo
Ni
R
Pt
R
Ru
Ta
Ti
R
A
Al
2
O
3
Al
2
O
3 (Sapphire)
R
A
AlGaAs
R
R
R
AlGaN
R
AlN
R
CdZnTe
R
GaAs
R
R
R
R
GaN
R
R
R
GaSb
R
HfO
2
InGaAlAs
R
R
InGaAsP
R
R
InP
R
R
ITO
R
Si
R
R
SiC
R
A
SiN
R
R
R
SiO
2
R
R
R
R
SiOxNy
Ta
2
O
5
A
TiN
TiO
2
W-TiW
R
A
ZnO
2
ZnS
R
ZnSe
R
ZrO
2
Material
RIE 1
(Retired)
RIE 2
(MRC)
RIE 3
(MRC)
RIE 5
(PlasmaTherm)
Si Deep RIE
(PlasmaTherm/Bosch Etch)
ICP Etch 1
(Panasonic E626I)
ICP Etch 2
(Panasonic E640)
ICP-Etch
(Unaxis VLR)
Ashers
(Technics PEII)
Plasma Clean
(Gasonics 2000)
UV Ozone Reactor
Plasma Activation
(EVG 810)
XeF2 Etch
(Xetch)
Vapor HF Etch
(uETCH)
CAIBE
(Oxford)
Category
:
Processing
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
Variants
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information