Difference between revisions of "KLA Tencor P7 - Saving Profile Data"
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(Added screenshots and instructions for using APEX to save profile data) |
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Revision as of 22:33, 10 April 2019
To save or export raw numeric data of a profile/scan.
- Click the "APEX" Analysis button to load the profile data in the APEX software.
- Press Alt-Tab (maybe multiple times) to Switch to the APEX software, which launches in the background.
- Go to the Studiables tab, and click "Save the Profile"
- Save as file type "TXT - ASCII"
- Choose your data options, typical parameters below: