Mike Silva
From UCSB Nanofab Wiki
Revision as of 16:45, 25 April 2019 by
Silva
(
talk
|
contribs
)
(
diff
)
← Older revision
|
Latest revision
(
diff
) |
Newer revision →
(
diff
)
Jump to navigation
Jump to search
Mike Silva
Position
Equipment Engineering Manager
Room Number
1109B
Phone
(805) 893-3096
Cell
(805) 450-2263
E-Mail
silva@ece.ucsb.edu
About
Information to come.
Current Work
Information to come.
Tools
Mike Silva is in charge of the following tools:
High Temp Oven (Blue M)
Sputter 5 (Lesker AXXIS)
Ion Beam Deposition (Veeco NEXUS)
ICP Etch 2 (Panasonic E640)
Plasma Clean (Gasonics 2000)
HF Vapor Etch
Tube Furnace Wafer Bonding (Thermco)
Step Profilometer (Dektak 6M)
Film Stress (Tencor Flexus)
Optical Film Thickness (Nanometric)
Category
:
Staff
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
English
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Tutorials
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information