Difference between revisions of "PECVD1-SIN Standard Recipe (PlasmaTherm 790)"

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Revision as of 15:36, 18 March 2014

PECVD 1 (PlasmaTherm 790)

https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard recipe=0

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