PECVD1-SIN Standard Recipe (PlasmaTherm 790)
From UCSB Nanofab Wiki
Revision as of 15:37, 18 March 2014 by
Biljana
(
talk
|
contribs
)
(
→PECVD 1 (PlasmaTherm 790)
)
(
diff
)
← Older revision
| Latest revision (diff) | Newer revision → (diff)
Jump to navigation
Jump to search
PECVD 1 (PlasmaTherm 790)
PECVD1-SiN Standard Recipe Spreadsheet
Navigation menu
Personal tools
Create account
Log in
Namespaces
Page
Discussion
Variants
Views
Read
View source
View history
More
Search
InvisibleMenu
QuickLinks
Lab Rules
Common Questions/FAQ
Staff List
Equipment Signup
Chemicals + MSDS
Equipment
Full Tool List
Lithography
Vacuum Deposition
Dry Etch
Wet Processing
Thermal Processing
Packaging
Metrology & Test
Recipes and Data
Lithography
Vacuum Deposition
Dry Etching
Wet Etching
Thermal Processing
Packaging Tools
Data + Info
Process Control Data
Calculators/Utilities
NanoFab Info
Research + Pubs
Tech Talks
Tools
What links here
Related changes
Special pages
Printable version
Permanent link
Page information