Difference between revisions of "PECVD1-SiN standard recipe.pdf"
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(Created page with "=PECVD1-SiN Standard Recipe= [https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing IBD Calibrations Spreadsheet] - Records ...") |
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Revision as of 15:17, 18 March 2014
PECVD1-SiN Standard Recipe
IBD Calibrations Spreadsheet - Records of historical film depositions (rates, indices), Uniformity etc.