Resistivity Mapper (CDE RESMAP)

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Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Location Bay ?
Tool Type Inspection, Test and Characterization
Manufacturer Creative Design Engineering
Description CDE Resmap 4 Point Resistivity Mapper
Primary Supervisor Bill Millerski
(805) 893-2655
wmillerski@ucsb.edu

Secondary Supervisor

Tony Bosch

Recipes N/A


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions

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