Difference between revisions of "SEM Sample Coater (Hummer)"
Jump to navigation
Jump to search
| Line 2: | Line 2: | ||
|picture=SEMSample.jpg | |picture=SEMSample.jpg | ||
|type = Inspection, Test and Characterization | |type = Inspection, Test and Characterization | ||
| − | |super= | + | |super= Don Freeborn |
|location=Bay 1 | |location=Bay 1 | ||
|description = | |description = | ||
Revision as of 11:12, 15 April 2020
|
About
This system is for coating Pd/Au thin layers onto samples that will charge during FESEM inspection.