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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 17:55, 2 February 2024 Biljana talk contribs uploaded a new version of File:SURFSCAN 6200 122123 small substrates.pdf
- 17:55, 2 February 2024 Biljana talk contribs uploaded a new version of File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:55, 2 February 2024 Biljana talk contribs uploaded a new version of File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:54, 2 February 2024 Biljana talk contribs uploaded a new version of File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 10:39, 24 January 2024 Biljana talk contribs uploaded a new version of File:Wafer Particle Count-Process Traveler.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD Troubleshooting Guide.pdf
- 11:02, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.pdf
- 11:02, 11 January 2024 Biljana talk contribs created page File:IBD SOP.pdf
- 10:57, 11 January 2024 Biljana talk contribs uploaded File:IBD SOP.docx
- 10:57, 11 January 2024 Biljana talk contribs created page File:IBD SOP.docx
- 15:26, 9 January 2024 Biljana talk contribs uploaded File:Autostep 200 Stepper manual focus.pdf
- 15:26, 9 January 2024 Biljana talk contribs created page File:Autostep 200 Stepper manual focus.pdf
- 16:46, 8 January 2024 Biljana talk contribs uploaded File:Focus and exposure optimization- Autostep200-II.pdf
- 16:46, 8 January 2024 Biljana talk contribs created page File:Focus and exposure optimization- Autostep200-II.pdf
- 16:34, 8 January 2024 Biljana talk contribs uploaded File:General information about AUTOSTEP 200.pdf
- 16:34, 8 January 2024 Biljana talk contribs created page File:General information about AUTOSTEP 200.pdf
- 15:53, 8 January 2024 Biljana talk contribs uploaded File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:53, 8 January 2024 Biljana talk contribs created page File:AUTOSTEP 200 User Accessible Commands 010524.pdf
- 15:43, 8 January 2024 Biljana talk contribs created page File:Autostep200 Training Old Training Manual.pdf
- 15:43, 8 January 2024 Biljana talk contribs uploaded File:Autostep200 Training Old Training Manual.pdf
- 12:39, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:39, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:33, 8 January 2024 Biljana talk contribs deleted page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:30, 8 January 2024 Biljana talk contribs created page File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200 (1).pdf
- 12:19, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 12:19, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:58, 8 January 2024 Biljana talk contribs created page File:Single centered mask-Piece 1st litho AUTOSTEP 200.pdf
- 11:41, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 11:41, 8 January 2024 Biljana talk contribs deleted page File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Setting up the Job.pdf
- 11:35, 8 January 2024 Biljana talk contribs created page File:Autostep 200 - Setting up the Job.pdf
- 10:59, 8 January 2024 Biljana talk contribs uploaded a new version of File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs uploaded File:Running the JOB- One Page Instructions.pdf
- 10:56, 8 January 2024 Biljana talk contribs created page File:Running the JOB- One Page Instructions.pdf
- 17:39, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:39, 5 January 2024 Biljana talk contribs created page File:Autostep 200 - Standard Operating Procedure-2023.pdf
- 17:20, 5 January 2024 Biljana talk contribs uploaded File:Autostep200+chucks+shims.pdf
- 17:20, 5 January 2024 Biljana talk contribs created page File:Autostep200+chucks+shims.pdf
- 17:12, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 chucks-2023.pdf
- 17:12, 5 January 2024 Biljana talk contribs created page File:Autostep 200 chucks-2023.pdf
- 17:00, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Chucks table.pdf
- 17:00, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Chucks table.pdf
- 16:30, 5 January 2024 Biljana talk contribs uploaded File:Autostep 200 Running a JOB One Page Instructions.pdf
- 16:30, 5 January 2024 Biljana talk contribs created page File:Autostep 200 Running a JOB One Page Instructions.pdf
- 15:43, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:43, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 010524.pdf
- 15:40, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf (have two files with the same name)
- 15:39, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:39, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:38, 5 January 2024 Biljana talk contribs deleted page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:34, 5 January 2024 Biljana talk contribs uploaded a new version of File:GCA 6300 Standard Operating Procedure 122823.pdf
- 15:28, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pdf
- 15:28, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pdf
- 15:26, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:26, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023 (1).pdf
- 15:11, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Chucks table 2023.pdf
- 15:11, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Chucks table 2023.pdf
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300+chucks+shims 2023.xlsx
- 15:07, 5 January 2024 Biljana talk contribs uploaded File:GCA 6300 Available chucks 2023.pptx
- 15:07, 5 January 2024 Biljana talk contribs created page File:GCA 6300 Available chucks 2023.pptx
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs created page File:Wafer Particle Count-Process Traveler.pdf
- 17:38, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 small substrates.pdf
- 17:38, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 small substrates.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 4inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 8inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs uploaded File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 17:37, 4 January 2024 Biljana talk contribs created page File:SURFSCAN 6200 122023 for 6inch wafers.pdf
- 15:37, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 - Commands.pdf
- 15:37, 29 December 2023 Biljana talk contribs created page File:GCA 6300 - Commands.pdf
- 12:46, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:46, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Standard Operating Procedure 122823.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA6300 Optimizing the process 6.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Shutdown and Start up.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Reboot frozen keyboard.pdf
- 12:29, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.pdf
- 12:29, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 General Information about system 4.pdf
- 12:28, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Running a JOB 3.pdf
- 12:28, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Running a JOB 3.pdf
- 11:54, 29 December 2023 Biljana talk contribs created page File:GCA 6300 Programming a Job 7.docx
- 11:54, 29 December 2023 Biljana talk contribs uploaded File:GCA 6300 Programming a Job 7.docx
- 17:15, 21 December 2023 Biljana talk contribs deleted page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 17:14, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 Small substrates.pdf
- 17:14, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 Small substrates.pdf
- 17:14, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 2 and 3inch wafers.pdf
- 17:14, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 2 and 3inch wafers.pdf
- 17:13, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 4inch wafers.pdf
- 17:13, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 4inch wafers.pdf
- 17:12, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 17:12, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 122123 for 2 and 3inch wafers.pdf
- 16:01, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 6inch wafers.pdf
- 16:01, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 6inch wafers.pdf
- 15:59, 21 December 2023 Biljana talk contribs uploaded File:SURFSCAN 6200 8inch wafers.pdf
- 15:59, 21 December 2023 Biljana talk contribs created page File:SURFSCAN 6200 8inch wafers.pdf
- 15:51, 21 December 2023 Biljana talk contribs deleted page Surfscan 6200 8inch wafers
- 15:50, 21 December 2023 Biljana talk contribs created page Surfscan 6200 8inch wafers (Created page with "SURFSCAN 6200 for 8inch wafers IMPORTANT: Do not use it for thick wafers (thickness > 1um )! 1. LOG IN using the access code: boss (if the keyboard is not working use the virt...")
- 10:10, 27 May 2020 Biljana talk contribs uploaded File:SOP for Advanced Vacuum PECVD.pdf (5-27-2020 Biljana Stamenic)
- 09:36, 27 May 2020 Biljana talk contribs uploaded File:Advanced Vacuum PECVD.pdf
- 10:59, 21 April 2020 Biljana talk contribs uploaded a new version of File:Adv. PECVD2-STD SiO2.xlsx
- 10:08, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD LSNitride2.xlsx
- 10:05, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2- STD Nitride2.xlsx
- 09:54, 21 April 2020 Biljana talk contribs uploaded File:Adv. PECVD2-STD SiO2.xlsx
- 14:36, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx
- 14:15, 15 April 2020 Biljana talk contribs uploaded File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx
- 14:14, 15 April 2020 Biljana talk contribs uploaded File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx
- 10:01, 8 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES 1st litho BL and BR orientation.pptx
- 20:32, 7 April 2020 Biljana talk contribs uploaded File:AUTOSTEP 200-PIECES instruction 6-20-19.pptx
- 15:26, 7 April 2020 Biljana talk contribs uploaded File:Mask plate-Sign convention.png
- 15:22, 7 April 2020 Biljana talk contribs uploaded File:Alignment key offset Sign Convention.png
- 14:32, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 photo for cleaning.png
- 14:24, 7 April 2020 Biljana talk contribs uploaded File:PECVD2 clean.png
- 14:21, 7 April 2020 Biljana talk contribs uploaded File:AdvPECVD2LSNdep2.jpg
- 14:14, 7 April 2020 Biljana talk contribs uploaded File:PECVD1-cleaning.png
- 11:23, 7 April 2020 Biljana talk contribs uploaded File:Glossary.docx
- 09:58, 7 April 2020 Biljana talk contribs deleted page File:Area from.png
- 09:50, 7 April 2020 Biljana talk contribs uploaded File:PECVD1 particulates in 2019.jpg
- 08:21, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST2 .png
- 08:19, 7 April 2020 Biljana talk contribs uploaded File:UCSBTEST1.png
- 11:24, 6 April 2020 Biljana talk contribs uploaded File:Area from 1.png
- 10:37, 6 April 2020 Biljana talk contribs uploaded File:Area from Equals Max size.png
- 10:30, 6 April 2020 Biljana talk contribs uploaded File:LPD Ranges.png
- 10:29, 6 April 2020 Biljana talk contribs uploaded File:Area from.png
- 17:17, 1 April 2020 Biljana talk contribs uploaded File:Recipe parameters.jpg
- 09:33, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST2.jpg
- 08:54, 1 April 2020 Biljana talk contribs uploaded File:UCSBTEST1Gain4.jpg (scan for gain4)
- 16:39, 30 March 2020 Biljana talk contribs uploaded File:PECVD.docx
- 12:02, 30 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-30-2020.docx
- 10:15, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-27-2020.pdf
- 10:00, 27 March 2020 Biljana talk contribs uploaded File:Unaxis SOP 3-12-2020.docx
- 15:09, 26 March 2020 Biljana talk contribs uploaded File:Autostep 200 panel door.png
- 13:20, 24 March 2020 Biljana talk contribs uploaded File:RMS control.png
- 13:17, 24 March 2020 Biljana talk contribs uploaded File:Autostep stage control.png
- 13:15, 24 March 2020 Biljana talk contribs uploaded File:Autostep DSW.png
- 09:03, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer switch.png
- 09:01, 24 March 2020 Biljana talk contribs uploaded File:Autostep main computer -1.png
- 08:56, 24 March 2020 Biljana talk contribs uploaded File:Autostep Cabinet .png
- 08:48, 24 March 2020 Biljana talk contribs uploaded File:Computer-2 -smart set.png
- 08:35, 24 March 2020 Biljana talk contribs uploaded File:Lower keyboard.png
- 08:00, 24 March 2020 Biljana talk contribs uploaded File:Autostep 200 Upper keyboard.png
- 14:30, 23 March 2020 Biljana talk contribs uploaded File:Autostep200 Training Manual 3-23-2020.pdf
- 14:11, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual- 3-23-2020.pdf
- 14:05, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Training Manual-3-23-2020.pdf
- 09:40, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2020.pdf
- 09:00, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Stepper Training Manual- Full version 2019.pdf
- 08:14, 23 March 2020 Biljana talk contribs uploaded File:GCA 6300 Reboot computers.docx
- 14:19, 26 March 2019 Biljana talk contribs uploaded File:UCSBTEST2 for small particles.png
- 14:06, 26 March 2019 Biljana talk contribs uploaded File:UCSBTEST.png
- 13:40, 26 March 2019 Biljana talk contribs uploaded File:UCSBTEST2 - gain4 for (0.160-1.60)um particles.png
- 16:03, 2 January 2019 Biljana talk contribs uploaded File:STD SiO2 5-9-18.pdf
- 15:49, 2 January 2019 Biljana talk contribs uploaded File:STD Oxide 5-9-18 Dep.recipe.pdf
- 15:39, 2 January 2019 Biljana talk contribs uploaded File:STD Nitride 5-9-18 Dep.recipe.pdf
- 15:26, 2 January 2019 Biljana talk contribs uploaded File:STD Nitride 5-9-18.pdf
- 15:03, 2 January 2019 Biljana talk contribs uploaded File:STD LSNitride2 5-9-18.pdf
- 14:48, 2 January 2019 Biljana talk contribs uploaded File:18.pdf
- 14:16, 2 January 2019 Biljana talk contribs uploaded File:STD LSNitride2 12-14-18 recipe.pdf
- 14:15, 2 January 2019 Biljana talk contribs uploaded a new version of File:STD LSNitride2 recipe new info 1-2-2019 Dep.recipe.pdf
- 14:05, 2 January 2019 Biljana talk contribs uploaded File:STD LSNitride2 recipe new info 1-2-2019 Dep.recipe.pdf
- 10:32, 27 December 2018 Biljana talk contribs uploaded a new version of File:STD LSNitride2 recipe new info.pdf
- 10:29, 27 December 2018 Biljana talk contribs uploaded File:STD LSNitride2 recipe new info.pdf
- 08:52, 20 October 2017 Biljana talk contribs uploaded File:New AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 08:43, 20 October 2017 Biljana talk contribs uploaded a new version of File:AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 08:42, 20 October 2017 Biljana talk contribs uploaded File:AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 13:28, 24 May 2017 Biljana talk contribs uploaded File:Thermal evaporator 2-new Sheet1.pdf
- 13:17, 24 May 2017 Biljana talk contribs uploaded File:Thermal evaporator 2.pdf
- 10:54, 24 May 2017 Biljana talk contribs uploaded File:Thermal evaporator 2 Sheet1.pdf
- 14:43, 23 May 2017 Biljana talk contribs uploaded File:Sputter5 SiO2 2017 SiO2 film.pdf
- 09:52, 23 May 2017 Biljana talk contribs uploaded File:Adv PECVD-LS Nitride2 300C standard recipe .pdf
- 10:07, 12 April 2016 Biljana talk contribs uploaded File:Surfscan.jpg
- 09:53, 12 April 2016 Biljana talk contribs uploaded File:Surfscan-Surfscan 6200 info.pdf
- 15:14, 8 May 2015 Biljana talk contribs uploaded File:Autostep 200 Training Manual-4-10-15 .pdf
- 15:10, 8 May 2015 Biljana talk contribs uploaded File:GCA 6300 Training Manual-4-10-2015.pdf
- 11:57, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 11:56, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
- 11:54, 9 January 2015 Biljana talk contribs uploaded File:New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
- 16:11, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
- 15:31, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-LS SION-recipe 2014 LS SION recipe.pdf
- 15:04, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
- 15:03, 8 January 2015 Biljana talk contribs uploaded File:New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
- 14:59, 11 December 2014 Biljana talk contribs uploaded File:NewPECVD1-SiO2-standard recipe 2014.pdf
- 14:58, 11 December 2014 Biljana talk contribs uploaded File:NewPECVD1-SiN-standard recipe 2014.pdf
- 14:41, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD-LS Nitride2 300C standard recipe.pdf
- 12:10, 11 December 2014 Biljana talk contribs uploaded File:Photos Sheet1.pdf
- 12:01, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD-Nitride2 300C standard recipe.pdf
- 10:52, 11 December 2014 Biljana talk contribs uploaded File:NewAdvPECVD OXIDE 300C standard recipe.pdf
- 12:18, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SION-recipe2014 LS SION recipe.pdf
- 11:22, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf
- 10:32, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiN standard recipe 2014.pdf
- 10:25, 10 December 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 2014 SiN standard recipe.pdf
- 16:37, 5 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SIN recipe 2014.pdf
- 16:23, 3 December 2014 Biljana talk contribs uploaded File:PECVD1-LS SION recipe 2014.pdf
- 11:42, 21 October 2014 Biljana talk contribs uploaded File:PECVD1-LS SIN-Turner05recipe 2014 LS SIN recipe.pdf
- 15:02, 17 October 2014 Biljana talk contribs uploaded File:Dirty platen photos.pdf
- 15:24, 10 October 2014 Biljana talk contribs uploaded File:PECVD1-SiON-recipe 2014 LS SION recipe LS SION recipe.pdf
- 10:53, 1 October 2014 Biljana talk contribs uploaded File:PECVD1-SiON-recipe 2014 LS SION recipe.pdf
- 09:18, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD-LS Nitride2 300C standard recipe.pdf
- 09:15, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD OXIDE 300C standard recipe.pdf
- 09:11, 16 April 2014 Biljana talk contribs uploaded File:AdvPECVD-Nitride2 300C standard recipe.pdf
- 15:44, 15 April 2014 Biljana talk contribs uploaded File:PECVD1 SiO2 Data-April 2014 SiO2 Data.pdf
- 15:42, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiO2-standard recipe 2014.pdf
- 15:29, 15 April 2014 Biljana talk contribs uploaded File:PECVD1 SIN Data-April 2014 SIN data.pdf
- 14:58, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 2014.pdf
- 14:55, 15 April 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A-April 2014.pdf
- 14:41, 15 April 2014 Biljana talk contribs uploaded File:New IBD TiO2 Data April 2014.pdf
- 14:36, 15 April 2014 Biljana talk contribs uploaded File:IBD TiO2 Data March 2014 IBD TIO2 Data.pdf
- 14:26, 15 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 Data April 2014.pdf
- 14:14, 15 April 2014 Biljana talk contribs uploaded File:New IBD SiN Data April 2014 IBD SIN data 2014.pdf
- 14:12, 15 April 2014 Biljana talk contribs uploaded File:New IBD SiN Data April 2014.pdf
- 14:02, 15 April 2014 Biljana talk contribs uploaded File:IBD SiN Data April 2014.pdf
- 13:59, 15 April 2014 Biljana talk contribs uploaded File:IBD SiN Data April 2014 IBD SIN data 2014.pdf
- 13:40, 15 April 2014 Biljana talk contribs uploaded File:IBD SiO2 Data April 2014 IBD SIO2 Data.pdf
- 16:57, 8 April 2014 Biljana talk contribs uploaded File:New Advanced PECVD-Nitride2 300C standard recipe.pdf
- 16:48, 8 April 2014 Biljana talk contribs uploaded File:New Advanced PECVD LS NITRIDE2 April 2014.pdf
- 16:45, 8 April 2014 Biljana talk contribs uploaded File:Adv PECVD LS NITRIDE2 April 2014.pdf
- 16:43, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 April 2014 LS NITRIDE 2 Data 2014 .pdf
- 16:26, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf
- 16:25, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf
- 16:24, 8 April 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf
- 13:53, 7 April 2014 Biljana talk contribs uploaded File:Advanced PECVD LS NITRIDE2 April 2014.pdf
- 13:51, 7 April 2014 Biljana talk contribs uploaded File:ADV OXIDE data April 2014.pdf
- 13:49, 7 April 2014 Biljana talk contribs uploaded File:ADV PECVD NITRIDE2-Data April 2014.pdf
- 10:26, 2 April 2014 Biljana talk contribs uploaded File:New IBD TiO2 deposition.pdf
- 10:23, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:22, 2 April 2014 Biljana talk contribs uploaded a new version of File:IBD TiO2 Data March 2014.pdf
- 10:16, 2 April 2014 Biljana talk contribs uploaded File:IBD TiO2 Data March 2014.pdf
- 15:59, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 Data March 2014.pdf
- 14:42, 1 April 2014 Biljana talk contribs uploaded File:IBD Ta2O5 deposition details.pdf
- 13:56, 1 April 2014 Biljana talk contribs uploaded File:IBD SiN Data March 2014.pdf
- 13:21, 1 April 2014 Biljana talk contribs uploaded File:IBD SiNdeposition.pdf
- 16:50, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Data March 2014.pdf
- 15:05, 31 March 2014 Biljana talk contribs uploaded File:New IBD SiO2 Standard Recipe.pdf
- 14:58, 31 March 2014 Biljana talk contribs uploaded File:IBD SiO2 Standard Recipe.pdf
- 13:36, 31 March 2014 Biljana talk contribs uploaded File:Thermal Evaporator2.pdf
- 11:56, 31 March 2014 Biljana talk contribs uploaded File:SFI Sputter.pdf
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- 10:25, 31 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C Standard Recipe.pdf
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- 16:52, 24 March 2014 Biljana talk contribs uploaded File:Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf
- 16:50, 24 March 2014 Biljana talk contribs uploaded a new version of File:Advanced PECVD-Nitride2 300C standard recipe.pdf
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- 12:08, 20 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe 1000A.pdf
- 16:20, 19 March 2014 Biljana talk contribs uploaded File:SiO2 100% SiH4 HDR 50C.pdf
- 14:55, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Data-March 2014.pdf
- 14:43, 19 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN-standard recipe.pdf
- 17:02, 13 March 2014 Biljana talk contribs uploaded File:ADV.PECVD OXIDE-March 2014.pdf
- 16:36, 13 March 2014 Biljana talk contribs uploaded File:ADV OXIDE data.pdf
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- 11:20, 13 March 2014 Biljana talk contribs uploaded File:PECVD1- SiO2 Calibratiion February 2014 SiO2 1000A.pdf
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- 10:00, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014.pdf
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- 16:53, 12 March 2014 Biljana talk contribs uploaded File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
- 09:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 09:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 11:01, 21 August 2013 Biljana talk contribs deleted page File:Panasonic1-SiO-Etch-SEM.pdf (Deleted old revision 20130821175255!Panasonic1-SiO-Etch-SEM.pdf)
- 11:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
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- 10:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 16:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 16:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 16:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 16:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 16:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 15:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
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- 15:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
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- 13:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 13:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
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- 12:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 12:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 12:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
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- 12:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
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- 16:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf
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- 16:33, 5 September 2012 Biljana talk contribs uploaded File:IBD SiN recipe details.pdf
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- 14:54, 5 September 2012 Biljana talk contribs uploaded File:Recipes.pdf
- 09:21, 16 August 2012 Biljana talk contribs uploaded File:Advanced PECVD2 Nitride 2 deposition.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-5W-high stress.pdf
- 17:39, 14 August 2012 Biljana talk contribs uploaded File:SiN deposition 2%SiH4 100C-50W-medium stress.pdf
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- 14:13, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN Data-particles, thickness, index.pdf
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- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 SiN deposition.pdf
- 14:01, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 LS SiN deposition.pdf
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- 14:00, 14 August 2012 Biljana talk contribs uploaded File:Advanced PECVD 2 Standard plasma clean.pdf
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- 11:20, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 Standard recipes.pdf
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- 10:52, 14 August 2012 Biljana talk contribs uploaded File:PECVD 1 SiO2 data-particles, thickness, index.pdf
- 17:33, 13 August 2012 Biljana talk contribs uploaded File:PM1O2 Etch 60min 200C.pdf
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- 16:49, 13 August 2012 Biljana talk contribs uploaded File:Vik's recipe.pdf
- 16:44, 13 August 2012 Biljana talk contribs uploaded File:Bill's recipe.pdf
- 11:20, 13 August 2012 Biljana talk contribs uploaded File:SiO2 and SIN calibrated etches.pdf
- 11:11, 13 August 2012 Biljana talk contribs uploaded File:SurfScan 6200-Operating Manual.pdf
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